AUTOMATIC EXTRACTION OF DISTANCE INFORMATION FROM STEREO IMAGES USING TRACKING DATA - In the Scanning Electron Microscope

Christian Dahmen, Tim Wortmann, Robert Tunnell, Sergej Fatikow

Abstract

This paper describes an approach to depth detection in scanning electron microscope images which aims at the automation of nanohandling procedures. It incorporates simultaneous tracking of an object in a stereo image pair, generated using a self-built magnetic lens for tilting the electron beam. Object depth is concluded from the object displacement. The tracking procedure is based on the active contours method, adjusted by a region based energy function. An automatic contour initialization is presented that makes use of edge detection. All methods described have been implemented and tested extensively in the designated automation environment. The approach is found to provide very accurate depth estimates even at a small level of magnification.

References

  1. Blake, A. and Isard, M. (2000). Active Contours. Springer.
  2. Forsyth, D. and Ponce, J. (2002). Computer Vision: A Modern Approach. Prentice Hall.
  3. Gonzalez and Woods (2008). Digital Image Processing. Prentice Hall.
  4. Jaehne, B. (1991). Digital Image Processing. Springer.
  5. Jahnisch, M. and Fatikow, S. (2007). 3-D vision feedback for nanohandling monitoring in a scanning electron microscope. International Journal of Optomechatronics, 1(1):4-26.
  6. Kass, M., Witkin, A., and Terzopoulos, D. (1988). Snakes: Active Contour Models. International Journal of Computer Vision, 1(4):321-331.
  7. Kratochvil, B. E., Dong, L. X., and Nelson, B. J. (2007). Real-time rigid-body visual tracking in a scanning electron microscope. In Proc. of the 7th IEEE Conf. on Nanotechnology (IEEE-NANO2007), Hong Kong, China.
  8. Sievers, T. (2006). Global sensor feedback for automatic nanohandling inside a scanning electron microscope. In Proc. of 2nd I*PROMS NoE Virtual International Conference on Intelligent Production Machines and Systems, pages 289-294.
  9. Sievers, T. (2007). Echtzeit-Objektverfolgung im Rasterelektronenmikroskop. PhD thesis, University of Oldenburg.
  10. Sievers, T. and Fatikow, S. (2006). Real-time object tracking for the robot-based nanohandling in a scanning electron microscope. Journal of Micromechatronics, 3(3-4):267-284.
Download


Paper Citation


in Harvard Style

Dahmen C., Wortmann T., Tunnell R. and Fatikow S. (2009). AUTOMATIC EXTRACTION OF DISTANCE INFORMATION FROM STEREO IMAGES USING TRACKING DATA - In the Scanning Electron Microscope . In Proceedings of the 6th International Conference on Informatics in Control, Automation and Robotics - Volume 1: ICINCO, ISBN 978-989-674-000-9, pages 79-85. DOI: 10.5220/0002209400790085


in Bibtex Style

@conference{icinco09,
author={Christian Dahmen and Tim Wortmann and Robert Tunnell and Sergej Fatikow},
title={AUTOMATIC EXTRACTION OF DISTANCE INFORMATION FROM STEREO IMAGES USING TRACKING DATA - In the Scanning Electron Microscope},
booktitle={Proceedings of the 6th International Conference on Informatics in Control, Automation and Robotics - Volume 1: ICINCO,},
year={2009},
pages={79-85},
publisher={SciTePress},
organization={INSTICC},
doi={10.5220/0002209400790085},
isbn={978-989-674-000-9},
}


in EndNote Style

TY - CONF
JO - Proceedings of the 6th International Conference on Informatics in Control, Automation and Robotics - Volume 1: ICINCO,
TI - AUTOMATIC EXTRACTION OF DISTANCE INFORMATION FROM STEREO IMAGES USING TRACKING DATA - In the Scanning Electron Microscope
SN - 978-989-674-000-9
AU - Dahmen C.
AU - Wortmann T.
AU - Tunnell R.
AU - Fatikow S.
PY - 2009
SP - 79
EP - 85
DO - 10.5220/0002209400790085