FREQUENCY CHARACTERIZATION OF A MAGNETICALLY ACTUATED MEMS RESONANT BIOSENSOR

V. Russino, F. Pieri, D. Paci

Abstract

In this work, the mass response of a resonant, CMOS (Complementary MOS) compatible MEMS sensor, oriented at the detection of diagnostic markers, is presented. The sensor is fabricated with a MEMS (Microelectro-mechanical System) post-processing method on a standard, CMOS-based VLSI technology, retaining maximum compatibility with the CMOS process flow. The mechanical resonator is based on inductive actuation and detection, and the sensing is based on the microbalance principle. A protocol for covalent bonding of organo-functional silanes (to be used as link sites for biomolecular probes) on the resonator surface is presented. The effect on the mechanical frequency response of a test mass attached to the surface is demonstrated by grafting of gold nanoparticles (NP’s) to the amino-terminated surface silanes.

References

  1. Ballarin, B., Cassani, M., Scavetta, E., and Tonelli, D. (2008). Self-assembled gold nanoparticles modified ito electrodes: The monolayer binder molecule effect. Electrochim. Acta, 53:8034-8044.
  2. Biswas, K., Das, S., Maurya, D., Kal, S., and Lahiri, S. (2006). Bulk micromachining of silicon in tmah-based etchants for aluminum passivation and smooth surface. Microel. J., 37:321-327.
  3. Diegoli, S., Mendes, P., Baguley, E., Leigh, S., Iqbal, P., Diaz, Y. G., Begum, S., Critchley, K., Hammond, G., Evans, S., Attwood, D., Jones, I., and Preece, J. (2006). ph-dependent gold nanoparticle self-organization on functionalized si/sio2 surfaces. Journal of Experimental Nanoscience, 3:333-353.
  4. Janshoff, A., Galla, H., and Steinem, C. (2000). Piezoelectric mass-sensing devices as biosensors - an alternative to optical biosensors? Angew. Chem. Int., 39:4004- 4032.
  5. Kim, J., Seidler, P., Fill, C., and Wan, S. (2008). Investigations of the effect of curing conditions on the structure and stability of amino-functionalized organic films on silicon substrates by fourier transform infrared spectroscopy, ellipsometry, and fluorescence microscopy. Surf. Sci., 602:3323-3330.
  6. Lenci, S., Tedeschi, L., Domenici, C., Lande, C., Nannini, A., Pennelli, G., Pieri, F., and Severi, S. (2010). Protein patterning on polycrystalline silicongermanium via standard uv lithography for biomems applications. Materials Science and Engineering C, doi:10.1016/j.msec.2010.07.002.
  7. Maboudian, R. and Howe, T. (1997). Critical review: adhesion in surface micromechanical structures. J. Vac. Sci. Technol. B., 15:1-20.
  8. Paci, D., Pieri, F., Toscano, P., and Nannini, A. (2008). A cmos-compatible, magnetically actuated resonator for mass sensing applications. Sensors and Actuators B, 129:10-17.
  9. Shen, W., Mathison, L., Petrenko, V., and Chin, B. (2010). A pulse system for spectrum analysis of magnetoelastic biosensors. Appl. Phys. Lett., 96:163502.
  10. Sone, H., Okano, H., and Hosaka, S. (2004). Picogram mass sensor using piezoresistive cantilever for biosensor. Jpn. J. Appl. Phys., 43:4663-4666.
  11. Teva, J., Abadala, G., Torresa, F., Verda, J., Pérez-Murano, F., and Barniola, N. (2006). A femtogram resolution mass sensor platform, based on soi electrostatically driven resonant cantilever. part i: Electromechanical model and parameter extraction. Ultramicroscopy, 106:800-807.
  12. Tilmans, H. (1996). Equivalent circuit representation of electromechanical transducers: I. lumped-parameter systems. J. Micromech. Microeng, 6:157-176.
  13. Zuniga, C., Rinaldi, M., Khamis, S., Johnson, A., and Piazza, G. (2009). Nanoenabled microelectromechanical sensor for volatile organic chemical detection. Applied Physics Letters, 94:223122.
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Paper Citation


in Harvard Style

Russino V., Pieri F. and Paci D. (2011). FREQUENCY CHARACTERIZATION OF A MAGNETICALLY ACTUATED MEMS RESONANT BIOSENSOR . In Proceedings of the International Conference on Biomedical Electronics and Devices - Volume 1: BIODEVICES, (BIOSTEC 2011) ISBN 978-989-8425-37-9, pages 391-396. DOI: 10.5220/0003167803910396


in Bibtex Style

@conference{biodevices11,
author={V. Russino and F. Pieri and D. Paci},
title={FREQUENCY CHARACTERIZATION OF A MAGNETICALLY ACTUATED MEMS RESONANT BIOSENSOR},
booktitle={Proceedings of the International Conference on Biomedical Electronics and Devices - Volume 1: BIODEVICES, (BIOSTEC 2011)},
year={2011},
pages={391-396},
publisher={SciTePress},
organization={INSTICC},
doi={10.5220/0003167803910396},
isbn={978-989-8425-37-9},
}


in EndNote Style

TY - CONF
JO - Proceedings of the International Conference on Biomedical Electronics and Devices - Volume 1: BIODEVICES, (BIOSTEC 2011)
TI - FREQUENCY CHARACTERIZATION OF A MAGNETICALLY ACTUATED MEMS RESONANT BIOSENSOR
SN - 978-989-8425-37-9
AU - Russino V.
AU - Pieri F.
AU - Paci D.
PY - 2011
SP - 391
EP - 396
DO - 10.5220/0003167803910396