SINX/SIO2 STACKED SENSITIVE THIN FILM FOR ISFET-BASED CHEMICAL AND BIOCHEMICAL SENSORS - Preparation and Characterization of the Stacked Thin Films and Sensors

J. F. Souza, M. B. Lima, I. Doi, P. J. Tatsch, J. A. Diniz, J. L. Gonçalves

Abstract

In this work, nitrogen rich SiNx thin film was deposited on SiO2/p-Si (100) substrate by low pressure chemical vapour deposition (LPCVD). The film was physically characterized using techniques such as Fourier infrared spectroscopy (FTIR), atomic force microscopy (AFM) and ellipsometry. The biocompatibility of such film was investigated by FTIR. Using a set of metal insulator semiconductor field effect transistors (MISFETs) and ion sensitive field effect transistors (ISFETs) fabricated, electrical characteristics and sensing properties were investigated. The biocompatibility of the SiNx film and the electrical quality of the SiNx/SiO2/p-Si interface obtained suggests that SiNx/SiO2 is an adequate insulator on ISFET based chemical and biochemical sensors.

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Paper Citation


in Harvard Style

Souza J., Lima M., Doi I., Tatsch P., Diniz J. and Gonçalves J. (2012). SINX/SIO2 STACKED SENSITIVE THIN FILM FOR ISFET-BASED CHEMICAL AND BIOCHEMICAL SENSORS - Preparation and Characterization of the Stacked Thin Films and Sensors . In Proceedings of the International Conference on Biomedical Electronics and Devices - Volume 1: BIODEVICES, (BIOSTEC 2012) ISBN 978-989-8425-91-1, pages 302-306. DOI: 10.5220/0003721603020306


in Bibtex Style

@conference{biodevices12,
author={J. F. Souza and M. B. Lima and I. Doi and P. J. Tatsch and J. A. Diniz and J. L. Gonçalves},
title={SINX/SIO2 STACKED SENSITIVE THIN FILM FOR ISFET-BASED CHEMICAL AND BIOCHEMICAL SENSORS - Preparation and Characterization of the Stacked Thin Films and Sensors},
booktitle={Proceedings of the International Conference on Biomedical Electronics and Devices - Volume 1: BIODEVICES, (BIOSTEC 2012)},
year={2012},
pages={302-306},
publisher={SciTePress},
organization={INSTICC},
doi={10.5220/0003721603020306},
isbn={978-989-8425-91-1},
}


in EndNote Style

TY - CONF
JO - Proceedings of the International Conference on Biomedical Electronics and Devices - Volume 1: BIODEVICES, (BIOSTEC 2012)
TI - SINX/SIO2 STACKED SENSITIVE THIN FILM FOR ISFET-BASED CHEMICAL AND BIOCHEMICAL SENSORS - Preparation and Characterization of the Stacked Thin Films and Sensors
SN - 978-989-8425-91-1
AU - Souza J.
AU - Lima M.
AU - Doi I.
AU - Tatsch P.
AU - Diniz J.
AU - Gonçalves J.
PY - 2012
SP - 302
EP - 306
DO - 10.5220/0003721603020306