Fault Modeling of Implantable MEMS Sensors

Jose A. Miguel, Y. Lechuga, M. Martinez, J. R. Berrazueta


The aim of this work is to analyse the fault-injection problem of implantable capacitive micro-electro-mechanical pressure sensors intended to be used as a part of smart stents for in-stent restenosis monitoring. The development of accurate fault models is mandatory in order to create a Design-for-Test methodology compatible with MEMS-based sensors as well as with its related CMOS electronic circuitry. Rigorous behavioural descriptions of both circular and square-shaped fault-free pressure sensors can be obtained from analytical expressions and numerical approximations. However, the deflection vs. pressure response of faulty sensors, suffering from contamination-based defects growth during the fabrication process, require the use of finite-elements analysis to be modelled, allowing the fulfilment of a realistic fault model library.


  1. Nichols M. et al., Cardiovascular Disease Statistics 2012, European Heart Network, Brussels. European Society of Cardiology, Sophia Antipolis, 2012.
  2. Garcia Blanco B. et al., Spanish Registry on Cardiac Catheterization and Interventional Cardiology: XXII Official Report of the Working Group on Cardiac Catheterization and Interventional Cardiology of the Spanish Society of Cardiology (1990-2012), Revista Española de Cardiología, vol. 66, pp. 894-904, 2013.
  3. Wolff T. et al., Screening for carotid artery stenosis: an update of the evidence for the US Preventive Services Task Force, Annals Internal Medicine, vol. 147, pp.854-859, 2007.
  4. Fowkes F.G. et al., Comparison of Global Estimates of Prevalence and risk factors for peripheral artery disease in 2000 and 2010: a systematic review and analysis, Lancet, vol. 382, pp. 1329-1340, 2013.
  5. Tendera M. et al., ESC Guidelines on the diagnosis and treatment of peripheral artery diseases. Document covering atherosclerotic disease of extracranial carotid and vertebral, mesenteri, renal, upper and lower extremity arteries: the Task Force on the Diagnosis and Treatment of Peripheral Artery Diseases of the European Society of Cardiology (ESC), European Heart Journal, vol. 32, pp. 2851-906, 2011.
  6. Rosing R., Reichenbach R., Richardson A., Generation of component level fault models for MEMS, Microelectronics Journal, vol. 33, pp. 861-868, 2002.
  7. Landsberger L. M., Nashed S., Kahrizi M., Paranjape M., On Hillocks Generated During Anisotropic Etching of Si in TMAH, Journal of Microelectromechanical Systems, vol. 5, no. 2, pp. 106-116, 1996.
  8. Takahata K., Gianchandani Y. B., Wise K.D., Micromachined antenna stents and cuffs for monitoring intraluminal pressure and flow, Journal of Microelectromechanical Systems, vol 15(5), pp. 1289- 1298, October 2006.
  9. Timoshenko S., Woinowsky-Krieger S., Theory of Plates and Shells, McGraw-Hill, New York, 1959.

Paper Citation

in Harvard Style

A. Miguel J., Lechuga Y., Martinez M. and R. Berrazueta J. (2015). Fault Modeling of Implantable MEMS Sensors . In Proceedings of the International Conference on Biomedical Electronics and Devices - Volume 1: BIODEVICES, (BIOSTEC 2015) ISBN 978-989-758-071-0, pages 162-167. DOI: 10.5220/0005278801620167

in Bibtex Style

author={Jose A. Miguel and Y. Lechuga and M. Martinez and J. R. Berrazueta},
title={Fault Modeling of Implantable MEMS Sensors},
booktitle={Proceedings of the International Conference on Biomedical Electronics and Devices - Volume 1: BIODEVICES, (BIOSTEC 2015)},

in EndNote Style

JO - Proceedings of the International Conference on Biomedical Electronics and Devices - Volume 1: BIODEVICES, (BIOSTEC 2015)
TI - Fault Modeling of Implantable MEMS Sensors
SN - 978-989-758-071-0
AU - A. Miguel J.
AU - Lechuga Y.
AU - Martinez M.
AU - R. Berrazueta J.
PY - 2015
SP - 162
EP - 167
DO - 10.5220/0005278801620167