Fault Modeling of Implantable MEMS Sensors

Jose A. Miguel, Y. Lechuga, M. Martinez, J. R. Berrazueta

Abstract

The aim of this work is to analyse the fault-injection problem of implantable capacitive micro-electro-mechanical pressure sensors intended to be used as a part of smart stents for in-stent restenosis monitoring. The development of accurate fault models is mandatory in order to create a Design-for-Test methodology compatible with MEMS-based sensors as well as with its related CMOS electronic circuitry. Rigorous behavioural descriptions of both circular and square-shaped fault-free pressure sensors can be obtained from analytical expressions and numerical approximations. However, the deflection vs. pressure response of faulty sensors, suffering from contamination-based defects growth during the fabrication process, require the use of finite-elements analysis to be modelled, allowing the fulfilment of a realistic fault model library.

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Paper Citation


in Harvard Style

A. Miguel J., Lechuga Y., Martinez M. and R. Berrazueta J. (2015). Fault Modeling of Implantable MEMS Sensors . In Proceedings of the International Conference on Biomedical Electronics and Devices - Volume 1: BIODEVICES, (BIOSTEC 2015) ISBN 978-989-758-071-0, pages 162-167. DOI: 10.5220/0005278801620167


in Bibtex Style

@conference{biodevices15,
author={Jose A. Miguel and Y. Lechuga and M. Martinez and J. R. Berrazueta},
title={Fault Modeling of Implantable MEMS Sensors},
booktitle={Proceedings of the International Conference on Biomedical Electronics and Devices - Volume 1: BIODEVICES, (BIOSTEC 2015)},
year={2015},
pages={162-167},
publisher={SciTePress},
organization={INSTICC},
doi={10.5220/0005278801620167},
isbn={978-989-758-071-0},
}


in EndNote Style

TY - CONF
JO - Proceedings of the International Conference on Biomedical Electronics and Devices - Volume 1: BIODEVICES, (BIOSTEC 2015)
TI - Fault Modeling of Implantable MEMS Sensors
SN - 978-989-758-071-0
AU - A. Miguel J.
AU - Lechuga Y.
AU - Martinez M.
AU - R. Berrazueta J.
PY - 2015
SP - 162
EP - 167
DO - 10.5220/0005278801620167