Thermal Stability Simulation of MEMS Micro Scanner - Multi-physics Simulations Coupled with Experimental Verifications

Seungoh Han, Chang-Hyeon Ji, Jae-Hyoung Park, Jong-Uk Bu

Abstract

A practical application of multi-physics simulations was presented. In order to analyse thermal stability of MEMS micro scanner, multi-physics simulation procedure was proposed and then verified by comparing the simulated results to the measured data. The proposed procedure started from defining simulation parameters and was verified stepwise by comparing the interim results with the related experimental data, which has increased the accuracy of the proposed, multi-physics simulation procedure. Based on those results, we could got more insight into the thermal stability issue and the allowable bias limit could be determined, which does not deteriorate the device performance significantly. The proposed simulation procedure is expected to contribute for successful commercialization of MEMS micro scanner by increasing its thermal stability.

References

  1. Bourgeois, C, Steinsland, E, Blanc, N and de Rooij, NF 1997, 'Design of resonators for the determination of the temperature coefficients of elastic constants of monocrystalline silicon', Proc. IEEE Int. Frequency Control Symp., pp. 791-799.
  2. Cho, AR, Han, A, Ju, S, Jeong, H, Park, JH, Kim, I, Bu, JU and Ji, CH 2015, 'Electromagnetic biaxial microscanner with mechanical amplification at resonance', Optics Express 23(13), pp. 16792-16802.
  3. CoventorWareTM 2015, Coventor, Inc. Available from: http://www.coventor.com/mems-solutions/products/ coventorware/. [5 March 2016].
  4. Davis, WO, Sprague, R and Miller, J 2008, 'MEMS-based pico projector display', IEEE/LEOS International Conference on Optical MEMs and Nanophotonics, pp. 31-32.
  5. Holmström, STS, Baran, U and Urey, H 2014, 'MEMS laser scanners: A review', J. MEMS 23(2), pp. 259- 275.
  6. Ji, CH, Choi, M, Kim, SC, Song, KC, Bu, JU and Nam, HJ 2007, 'Electromagnetic two-dimensional scanner using radial magnetic field', J. MEMS 16(4), pp. 989- 996.
  7. Kurth, S, Kaufmann, C, Hahn, R, Mehner, J, Dötzel, W and Gessner, T 2007, 'Performance and reliability test of MEMS scanners', Proc. of SPIE Vol. 6463, pp. 64630H-1-12.
  8. Lee, H, Kwon, D, Park, H, Kim, HW, Lee, C and Lee, J 2003, 'Rapid thermal annealing treatment of electroplated Cu films', J. Korea Phys. Soc. 43(5), pp. 841-846.
  9. Moss, R, Yuan, P, Bai, X, Quesada, E and Sudharsanan, R 2012, 'Low-cost compact MEMS scanning LADAR system for robotic applications', Proc. of SPIE Vol. 8379, pp. 837903-1-9.
  10. Pengwang, E, Rabenorosoa, K, Rakotondrabe, M and Andreff, N 2016, 'Scanning micromirror platform based on MEMS technology for medical application', Micromachines 7(2), pp. 24-52.
  11. Saeedi, E, Miao, X and Amirparviz, B 2014, Whole image scanning mirror display system, US Patent 8,817,379B2.
  12. Strathman, M, Liu, Y, Keeler, EG, Song, M, Baran, U, Xi, J, Sun, MT, Wang, R, Li, X and Lin, LY 2015, 'MEMS scanning micromirror for optical coherence tomography', Biomedical Optics Express 6(1), pp. 211-224.
  13. Varona, J, Tecpoyotl-Torres, M and Hmoui, AA 2007, 'Modelling of MEMS thermal actuation with external heat source', Electronics, Robotics and Automotive Mechanics Conf., pp. 591-596.
  14. Zhang, XC, Myers, EB, Sader, JE and Roukes, ML 2013, 'Nanomechanical torsional resonators for frequencyshift infrared thermal sensing', Nano Lett. 13(4), pp. 1528-1534.
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Paper Citation


in Harvard Style

Han S., Ji C., Park J. and Bu J. (2016). Thermal Stability Simulation of MEMS Micro Scanner - Multi-physics Simulations Coupled with Experimental Verifications . In Proceedings of the 6th International Conference on Simulation and Modeling Methodologies, Technologies and Applications - Volume 1: SIMULTECH, ISBN 978-989-758-199-1, pages 84-88. DOI: 10.5220/0005962700840088


in Bibtex Style

@conference{simultech16,
author={Seungoh Han and Chang-Hyeon Ji and Jae-Hyoung Park and Jong-Uk Bu},
title={Thermal Stability Simulation of MEMS Micro Scanner - Multi-physics Simulations Coupled with Experimental Verifications},
booktitle={Proceedings of the 6th International Conference on Simulation and Modeling Methodologies, Technologies and Applications - Volume 1: SIMULTECH,},
year={2016},
pages={84-88},
publisher={SciTePress},
organization={INSTICC},
doi={10.5220/0005962700840088},
isbn={978-989-758-199-1},
}


in EndNote Style

TY - CONF
JO - Proceedings of the 6th International Conference on Simulation and Modeling Methodologies, Technologies and Applications - Volume 1: SIMULTECH,
TI - Thermal Stability Simulation of MEMS Micro Scanner - Multi-physics Simulations Coupled with Experimental Verifications
SN - 978-989-758-199-1
AU - Han S.
AU - Ji C.
AU - Park J.
AU - Bu J.
PY - 2016
SP - 84
EP - 88
DO - 10.5220/0005962700840088