The Temperature Control System of Continuous Diffusion Furnace

Xianxin Ke, Zhitong Luo, Yujiao Zhu, Yang Liu

Abstract

The diffusion furnace is an important and indispensable equipment in the production process of solar cell,it plays a crucial role in the photoelectric conversion efficiency of the solar cell. Production efficiency and temperature control precision of traditional closed diffusion furnace is low. To solve this problem,this paper presents a temperature control system of continuous diffusion furnace. The system uses PID cascade control algorithm based on Smith estimating pre-compensation to achieve the temperature control of furnace and ensure the uniformity and stability of the temperature, so as to ensure the uniformity of the dopant diffusion. The simulation results verify the effectiveness of the control algorithm; and practical experiments prove the feasibility of the temperature control system.

References

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Paper Citation


in Harvard Style

Ke X., Luo Z., Zhu Y. and Liu Y. (2016). The Temperature Control System of Continuous Diffusion Furnace . In Proceedings of the 13th International Conference on Informatics in Control, Automation and Robotics - Volume 1: ICINCO, ISBN 978-989-758-198-4, pages 227-233. DOI: 10.5220/0005996402270233


in Bibtex Style

@conference{icinco16,
author={Xianxin Ke and Zhitong Luo and Yujiao Zhu and Yang Liu},
title={The Temperature Control System of Continuous Diffusion Furnace},
booktitle={Proceedings of the 13th International Conference on Informatics in Control, Automation and Robotics - Volume 1: ICINCO,},
year={2016},
pages={227-233},
publisher={SciTePress},
organization={INSTICC},
doi={10.5220/0005996402270233},
isbn={978-989-758-198-4},
}


in EndNote Style

TY - CONF
JO - Proceedings of the 13th International Conference on Informatics in Control, Automation and Robotics - Volume 1: ICINCO,
TI - The Temperature Control System of Continuous Diffusion Furnace
SN - 978-989-758-198-4
AU - Ke X.
AU - Luo Z.
AU - Zhu Y.
AU - Liu Y.
PY - 2016
SP - 227
EP - 233
DO - 10.5220/0005996402270233