Design of Mems-Based Gas Sensor Micro Heat Plate

L. X. He, F. Wang, G. Q. Niu, H. M. Gong, Z. T. Yang, W. He, J. M. Cao

Abstract

In this academic paper, a mems-based device: micro gas sensor micro heat plate (MHP) was designed and produced. Unlike the traditional MHP, of which the heating electrode and test electrode is with non-coplanar design, the MHP designed in this paper has coplanar heating electrode and test electrode with higher heating efficiency. Platinum was used as heating electrode material in the design. By taking advantage of platinum's property of relatively stable resistance temperature coefficient, as well as by controlling the heating voltage of MHP, the temperature of the gas sensor was accurately regulated. The design also utilized Comsol, the finite element simulation software, to analyze and optimize the heating performance and heat distribution of MHP.

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Paper Citation


in Harvard Style

He L., Wang F., Niu G., Gong H., Yang Z., He W. and Cao J. (2018). Design of Mems-Based Gas Sensor Micro Heat Plate.In Proceedings of the International Workshop on Materials, Chemistry and Engineering - Volume 1: IWMCE, ISBN 978-989-758-346-9, pages 610-615. DOI: 10.5220/0007442206100615


in Bibtex Style

@conference{iwmce18,
author={L. X. He and F. Wang and G. Q. Niu and H. M. Gong and Z. T. Yang and W. He and J. M. Cao},
title={Design of Mems-Based Gas Sensor Micro Heat Plate},
booktitle={Proceedings of the International Workshop on Materials, Chemistry and Engineering - Volume 1: IWMCE,},
year={2018},
pages={610-615},
publisher={SciTePress},
organization={INSTICC},
doi={10.5220/0007442206100615},
isbn={978-989-758-346-9},
}


in EndNote Style

TY - CONF

JO - Proceedings of the International Workshop on Materials, Chemistry and Engineering - Volume 1: IWMCE,
TI - Design of Mems-Based Gas Sensor Micro Heat Plate
SN - 978-989-758-346-9
AU - He L.
AU - Wang F.
AU - Niu G.
AU - Gong H.
AU - Yang Z.
AU - He W.
AU - Cao J.
PY - 2018
SP - 610
EP - 615
DO - 10.5220/0007442206100615