Combined High-Resolution Imaging and Spectroscopy System - A Versatile and Multi-modal Metrology Platform

Tobias Hegemann, Fabian Bürger, Josef Pauli

2017

Abstract

Multi- and hyperspectral measurement methods are a versatile approach to analyzing and understanding material properties. Especially imaging techniques allow for a precise sensing of surface properties. This paper presents a novel and multi-purpose metrology platform for high-resolution spectral measurements. The system is able to acquire multispectral images with six different spectral channels as well as hyperspectral point measurements and images. This is realized with a combined measurement head that includes a gray value camera as well as two spectrometers ranging from 190nm to 1,700nm. A three axis Cartesian robot with nanometer-precision allows the analysis of large samples with a size up to 40  10  10 cm and a weight of up to 25kg. Approaches to automatically focus both the camera and the spectrometers are presented. The calibration process between the camera and the spectrometers, which is necessary to acquire the full spectral information corresponding to each pixel of the camera image, is described. Example images and measurements are discussed to show the potential of the metrology platform.

References

  1. Canny, J. (1986). A computational approach to edge detection. IEEE Transactions on Pattern Analysis and Machine Intelligence, (6):679-698.
  2. Dickinson, M., Bearman, G., Tille, S., Lansford, R., and Fraser, S. (2001). Multi-spectral imaging and linear unmixing add a whole new dimension to laser scanning fluorescence microscopy. Biotechniques, 31(6):1272-1279.
  3. Duda, R. O. and Hart, P. E. (1972). Use of the hough transformation to detect lines and curves in pictures. Communications of the ACM, 15(1):11-15.
  4. Efford, N. (2000). Digital image processing: a practical introduction using java (with CD-ROM). AddisonWesley Longman Publishing Co., Inc.
  5. Green, R. O., Eastwood, M. L., Sarture, C. M., Chrien, T. G., Aronsson, M., Chippendale, B. J., Faust, J. A., Pavri, B. E., Chovit, C. J., Solis, M., et al. (1998). Imaging spectroscopy and the airborne visible/infrared imaging spectrometer (aviris). Remote Sensing of Environment, 65(3):227-248.
  6. Kort üm, G. (2012). Reflectance spectroscopy: principles, methods, applications. Springer Science & Business Media.
  7. Long, D. A. (1977). Raman spectroscopy. New York, pages 1-12.
  8. Panasyuk, S. V., Yang, S., Faller, D. V., Ngo, D., Lew, R. A., Freeman, J. E., and Rogers, A. E. (2007). Medical hyperspectral imaging to facilitate residual tumor identification during surgery. Cancer biology & therapy, 6(3):439-446.
  9. Radziemski, L. J. and Cremers, D. A. (2006). Handbook of Laser Induced Breakdown Spectroscopy. John Wiley & Sons, West Sussex, England.
  10. Skoog, D. A. and West, D. M. (1980). Principles of instrumental analysis, volume 158. Saunders College Philadelphia.
  11. Volin, C. E., Garcia, J. P., Dereniak, E. L., Descour, M. R., Hamilton, T., and McMillan, R. (2001). Midwaveinfrared snapshot imaging spectrometer. Applied optics, 40(25):4501-4506.
  12. Weser, T., Rottensteiner, F., Willneff, J., Poon, J., and Fraser, C. S. (2008). Development and testing of a generic sensor model for pushbroom satellite imagery. The Photogrammetric Record, 23(123):255-274.
  13. Yazdanfar, S., Kenny, K. B., Tasimi, K., Corwin, A. D., Dixon, E. L., and Filkins, R. J. (2008). Simple and robust image-based autofocusing for digital microscopy. Opt. Express, 16(12):8670-8677.
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Paper Citation


in Harvard Style

Hegemann T., Bürger F. and Pauli J. (2017). Combined High-Resolution Imaging and Spectroscopy System - A Versatile and Multi-modal Metrology Platform . In Proceedings of the 5th International Conference on Photonics, Optics and Laser Technology - Volume 1: PHOTOPTICS, ISBN 978-989-758-223-3, pages 215-222. DOI: 10.5220/0006134602150222


in Bibtex Style

@conference{photoptics17,
author={Tobias Hegemann and Fabian Bürger and Josef Pauli},
title={Combined High-Resolution Imaging and Spectroscopy System - A Versatile and Multi-modal Metrology Platform},
booktitle={Proceedings of the 5th International Conference on Photonics, Optics and Laser Technology - Volume 1: PHOTOPTICS,},
year={2017},
pages={215-222},
publisher={SciTePress},
organization={INSTICC},
doi={10.5220/0006134602150222},
isbn={978-989-758-223-3},
}


in EndNote Style

TY - CONF
JO - Proceedings of the 5th International Conference on Photonics, Optics and Laser Technology - Volume 1: PHOTOPTICS,
TI - Combined High-Resolution Imaging and Spectroscopy System - A Versatile and Multi-modal Metrology Platform
SN - 978-989-758-223-3
AU - Hegemann T.
AU - Bürger F.
AU - Pauli J.
PY - 2017
SP - 215
EP - 222
DO - 10.5220/0006134602150222