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Authors: Xianxin Ke ; Zhitong Luo ; Yujiao Zhu and Yang Liu

Affiliation: Shanghai University, China

Keyword(s): Continuous Diffusion Furnace, P-N Junction, Smith Estimating Pre-Compensation, Temperature Control System.

Related Ontology Subjects/Areas/Topics: Engineering Applications ; Informatics in Control, Automation and Robotics ; Intelligent Control Systems and Optimization ; Robotics and Automation ; Signal Processing, Sensors, Systems Modeling and Control

Abstract: The diffusion furnace is an important and indispensable equipment in the production process of solar cell，it plays a crucial role in the photoelectric conversion efficiency of the solar cell. Production efficiency and temperature control precision of traditional closed diffusion furnace is low. To solve this problem，this paper presents a temperature control system of continuous diffusion furnace. The system uses PID cascade control algorithm based on Smith estimating pre-compensation to achieve the temperature control of furnace and ensure the uniformity and stability of the temperature, so as to ensure the uniformity of the dopant diffusion. The simulation results verify the effectiveness of the control algorithm; and practical experiments prove the feasibility of the temperature control system.

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Paper citation in several formats:
Ke, X.; Luo, Z.; Zhu, Y. and Liu, Y. (2016). The Temperature Control System of Continuous Diffusion Furnace. In Proceedings of the 13th International Conference on Informatics in Control, Automation and Robotics - Volume 1: ICINCO; ISBN 978-989-758-198-4; ISSN 2184-2809, SciTePress, pages 227-233. DOI: 10.5220/0005996402270233

@conference{icinco16,
author={Xianxin Ke. and Zhitong Luo. and Yujiao Zhu. and Yang Liu.},
title={The Temperature Control System of Continuous Diffusion Furnace},
booktitle={Proceedings of the 13th International Conference on Informatics in Control, Automation and Robotics - Volume 1: ICINCO},
year={2016},
pages={227-233},
publisher={SciTePress},
organization={INSTICC},
doi={10.5220/0005996402270233},
isbn={978-989-758-198-4},
issn={2184-2809},
}

TY - CONF

JO - Proceedings of the 13th International Conference on Informatics in Control, Automation and Robotics - Volume 1: ICINCO
TI - The Temperature Control System of Continuous Diffusion Furnace
SN - 978-989-758-198-4
IS - 2184-2809
AU - Ke, X.
AU - Luo, Z.
AU - Zhu, Y.
AU - Liu, Y.
PY - 2016
SP - 227
EP - 233
DO - 10.5220/0005996402270233
PB - SciTePress

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