Molecular Beam Epitaxy of (ErxSc1-x)2O3 on Si(111) for Active Integrated Optical Devices Topics: Optical Materials; Photonic and Optoelectronic Materials and Devices; Waveguide Lasers In Proceedings of 2nd International Conference on Photonics, Optics and Laser Technology PHOTOPTICS - Volume 1, 175-179, 2014 , Lisbon, Portugal