The Design of a Fully Differential Capacitive Pressure Sensor with Unbalanced Parasitic Input Capacitances in 130nm CMOS Technology

B. T. Bradford; W. Krautschneider; D. Schroeder

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Paper

The Design of a Fully Differential Capacitive Pressure Sensor with Unbalanced Parasitic Input Capacitances in 130nm CMOS Technology

Topics: Biomedical Sensors; Implantable Electronics; Low-Power Design; Microelectronics; Nanotechnologies

In Proceedings of the International Conference on Biomedical Electronics and Devices - Volume 0BIOSTEC, 137-142, 2013 , Barcelona, Spain

Authors: B. T. Bradford ; W. Krautschneider and D. Schroeder

Affiliation: Hamburg University of Technology, Germany

Keyword(s): Capacitive Pressure Sensor, Correlated Double Sampling, SC Noise Analysis.

Related Ontology Subjects/Areas/Topics: Biomedical Engineering ; Biomedical Instruments and Devices ; Biomedical Sensors ; Implantable Electronics ; Low-Power Design ; Microelectronics ; Nanotechnologies

Abstract: A switched capacitor amplifier for measuring absolute pressure with a micro-machined capacitive pressure sensor using correlated double sampling has been designed in 130nm CMOS technology. The switched capacitor amplifier design uses a combination of correlated double sampling, input offset cancellation, and output offset cancellation to help reject 1f noise and DC offset mismatch. A method for sizing the operational transconductance amplifier (OTA) components according to the system noise, accuracy, and bandwidth requirements is presented.

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Paper citation in several formats:

T. Bradford, B.; Krautschneider, W. and Schroeder, D. (2013). The Design of a Fully Differential Capacitive Pressure Sensor with Unbalanced Parasitic Input Capacitances in 130nm CMOS Technology. In Proceedings of the International Conference on Biomedical Electronics and Devices (BIOSTEC 2013) - BIODEVICES; ISBN 978-989-8565-34-1; ISSN 2184-4305, SciTePress, pages 137-142. DOI: 10.5220/0004237801370142

@conference{biodevices13,
author={B. {T. Bradford}. and W. Krautschneider. and D. Schroeder.},
title={The Design of a Fully Differential Capacitive Pressure Sensor with Unbalanced Parasitic Input Capacitances in 130nm CMOS Technology},
booktitle={Proceedings of the International Conference on Biomedical Electronics and Devices (BIOSTEC 2013) - BIODEVICES},
year={2013},
pages={137-142},
publisher={SciTePress},
organization={INSTICC},
doi={10.5220/0004237801370142},
isbn={978-989-8565-34-1},
issn={2184-4305},
}

TY - CONF

JO - Proceedings of the International Conference on Biomedical Electronics and Devices (BIOSTEC 2013) - BIODEVICES
TI - The Design of a Fully Differential Capacitive Pressure Sensor with Unbalanced Parasitic Input Capacitances in 130nm CMOS Technology
SN - 978-989-8565-34-1
IS - 2184-4305
AU - T. Bradford, B.
AU - Krautschneider, W.
AU - Schroeder, D.
PY - 2013
SP - 137
EP - 142
DO - 10.5220/0004237801370142
PB - SciTePress