A Concept of Ultraviolet Lithography System and Design of its Rear Part using Artificial Intelligence for Starting Design

Irina Livshits; Nenad Zoric

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Paper

A Concept of Ultraviolet Lithography System and Design of its Rear Part using Artificial Intelligence for Starting Design

Topics: Applied Industrial Optics; Optical Materials and Devices; Photonic and Optoelectronic Materials and Devices

In Proceedings of the 4th International Conference on Photonics, Optics and Laser Technology PHOTOPTICS - Volume 1, 82-86, 2016 , Rome, Italy

Authors: Irina Livshits and Nenad Zoric

Affiliation: ITMO University, Russian Federation

Keyword(s): Lithography, Optical Design, Projection Lens, UV, Artificial Intelligence, Starting Point.

Related Ontology Subjects/Areas/Topics: Photonic and Optoelectronic Materials and Devices ; Photonics ; Photonics, Optics and Laser Technology

Abstract: This paper describes a concept for designing a projection lens in lithographic optical system for 365 nm. Our approach for meeting this objective is to use the starting design obtained by artificial intelligence mode in Synopsys software. The proposed method describes the steps of getting a desired starting point of the optical system and the optimization problems in the optical system with a high numerical aperture.

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Paper citation in several formats:

Livshits, I. and Zoric, N. (2016). A Concept of Ultraviolet Lithography System and Design of its Rear Part using Artificial Intelligence for Starting Design. In Proceedings of the 4th International Conference on Photonics, Optics and Laser Technology - PHOTOPTICS; ISBN 978-989-758-174-8; ISSN 2184-4364, SciTePress, pages 82-86. DOI: 10.5220/0005688500820086

@conference{photoptics16,
author={Irina Livshits. and Nenad Zoric.},
title={A Concept of Ultraviolet Lithography System and Design of its Rear Part using Artificial Intelligence for Starting Design},
booktitle={Proceedings of the 4th International Conference on Photonics, Optics and Laser Technology - PHOTOPTICS},
year={2016},
pages={82-86},
publisher={SciTePress},
organization={INSTICC},
doi={10.5220/0005688500820086},
isbn={978-989-758-174-8},
issn={2184-4364},
}

TY - CONF

JO - Proceedings of the 4th International Conference on Photonics, Optics and Laser Technology - PHOTOPTICS
TI - A Concept of Ultraviolet Lithography System and Design of its Rear Part using Artificial Intelligence for Starting Design
SN - 978-989-758-174-8
IS - 2184-4364
AU - Livshits, I.
AU - Zoric, N.
PY - 2016
SP - 82
EP - 86
DO - 10.5220/0005688500820086
PB - SciTePress