RECONSTRUCTING WAFER SURFACES WITH MODEL BASED SHAPE FROM SHADING

Alexander Nisenboim; Alfred Bruckstein

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Paper

RECONSTRUCTING WAFER SURFACES WITH MODEL BASED SHAPE FROM SHADING

Topics: 2D and 3D Scene Understanding; Image-Based Modeling and 3D Reconstruction; Localization and Recognition of 3D Object Features; Recognizing 3-D Object Shapes from Range Data

In Proceedings of the Second International Conference on Computer Vision Theory and Applications - Volume 2: VISAPP, 333-340, 2007 , Barcelona, Spain

Authors: Alexander Nisenboim and Alfred Bruckstein

Affiliation: Israel Institute of Technology, Israel

Keyword(s): Shape from shading, wafer, scanning electron microscope, mathematical model, wavelets, non-linear optimization.

Related Ontology Subjects/Areas/Topics: Applications ; Computer Vision, Visualization and Computer Graphics ; Geometry and Modeling ; Image-Based Modeling ; Pattern Recognition ; Software Engineering

Abstract: Model based Shape From Shading (SFS) is a promising paradigm introduced by J. Atick for solving such inverse problems when we happen to have some prior information on the depth profiles to be recovered. In the present work we adopt this approach to address the problem of recovering wafer profiles from images taken by a Scanning Electron Microscope (SEM). This problem arises naturally in the microelectronics inspection industry. A low dimensional model based on our prior knowledge of the types of depth profiles of wafer surfaces has been developed and based on it the SFS problem becomes an optimal parameter estimation. Wavelet techniques were then employed to calculate a good initial guess to be used in Levenberg-Marguardt (LM) minimization process that yields the desired profile parametrization. The proposed algorithm has been tested under both Lambertian and SEM imaging models.

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Paper citation in several formats:

Nisenboim, A. and Bruckstein, A. (2007). RECONSTRUCTING WAFER SURFACES WITH MODEL BASED SHAPE FROM SHADING. In Proceedings of the Second International Conference on Computer Vision Theory and Applications (VISIGRAPP 2007) - Volume 2: VISAPP; ISBN 978-972-8865-74-0; ISSN 2184-4321, SciTePress, pages 333-340. DOI: 10.5220/0002043403330340

@conference{visapp07,
author={Alexander Nisenboim. and Alfred Bruckstein.},
title={RECONSTRUCTING WAFER SURFACES WITH MODEL BASED SHAPE FROM SHADING},
booktitle={Proceedings of the Second International Conference on Computer Vision Theory and Applications (VISIGRAPP 2007) - Volume 2: VISAPP},
year={2007},
pages={333-340},
publisher={SciTePress},
organization={INSTICC},
doi={10.5220/0002043403330340},
isbn={978-972-8865-74-0},
issn={2184-4321},
}

TY - CONF

JO - Proceedings of the Second International Conference on Computer Vision Theory and Applications (VISIGRAPP 2007) - Volume 2: VISAPP
TI - RECONSTRUCTING WAFER SURFACES WITH MODEL BASED SHAPE FROM SHADING
SN - 978-972-8865-74-0
IS - 2184-4321
AU - Nisenboim, A.
AU - Bruckstein, A.
PY - 2007
SP - 333
EP - 340
DO - 10.5220/0002043403330340
PB - SciTePress