Testing of Micro-optics using Digital Holographic Interferometric Microscopy

Varun Kumar; Chandra Shakher

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Paper

Testing of Micro-optics using Digital Holographic Interferometric Microscopy

Topics: Spectroscopy, Imaging and Metrology

In Proceedings of the 4th International Conference on Photonics, Optics and Laser Technology PHOTOPTICS - Volume 1, 140-145, 2016 , Rome, Italy

Authors: Varun Kumar and Chandra Shakher

Affiliation: Indian Institute of Technology Delhi, India

Keyword(s): Digital Holographic Interferometric Microscopy, Phase Map, Micro-lens Array, Micro-optics.

Related Ontology Subjects/Areas/Topics: Optics ; Photonics, Optics and Laser Technology ; Spectroscopy, Imaging and Metrology

Abstract: Digital holographic interferometric microscopy (DHIM) is used as metrological tool for the testing of micro-optics. The paper presents the measurement of sag height (h), radius of curvature (ROC), and shape of micro-lens. The advantage of using the DHIM is that the distortions due to aberrations in the optical system are avoided by the interferometric comparison of reconstructed phase with and without the object.

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Paper citation in several formats:

Kumar, V. and Shakher, C. (2016). Testing of Micro-optics using Digital Holographic Interferometric Microscopy. In Proceedings of the 4th International Conference on Photonics, Optics and Laser Technology - PHOTOPTICS; ISBN 978-989-758-174-8; ISSN 2184-4364, SciTePress, pages 140-145. DOI: 10.5220/0005742901400145

@conference{photoptics16,
author={Varun Kumar. and Chandra Shakher.},
title={Testing of Micro-optics using Digital Holographic Interferometric Microscopy},
booktitle={Proceedings of the 4th International Conference on Photonics, Optics and Laser Technology - PHOTOPTICS},
year={2016},
pages={140-145},
publisher={SciTePress},
organization={INSTICC},
doi={10.5220/0005742901400145},
isbn={978-989-758-174-8},
issn={2184-4364},
}

TY - CONF

JO - Proceedings of the 4th International Conference on Photonics, Optics and Laser Technology - PHOTOPTICS
TI - Testing of Micro-optics using Digital Holographic Interferometric Microscopy
SN - 978-989-758-174-8
IS - 2184-4364
AU - Kumar, V.
AU - Shakher, C.
PY - 2016
SP - 140
EP - 145
DO - 10.5220/0005742901400145
PB - SciTePress