Authors:
Xin Zhao
1
and
Schmidt J. Dominik
2
Affiliations:
1
Sichuan University and International Technological University, China
;
2
International Technological University, United States
Keyword(s):
Micro-electro-mechanical Systems, Long-Wave Infrared, Tunable Fabry-Pérot Filter, Glucose Sensor.
Related
Ontology
Subjects/Areas/Topics:
Biomedical Engineering
;
Biomedical Instruments and Devices
;
Biomedical Sensors
;
Devices
;
Hardware
;
Health Monitoring Devices
;
Human-Computer Interaction
;
MEMS
;
Microelectronics
;
Physiological Computing Systems
;
Sensor Networks
Abstract:
This paper presents a Tunable MEMS Fabry-Pérot (FP) filter for the application of optical glucose sensor in Long-Wave Infrared (LWIR) range. The structure design, simulation, fabrication process and testing system are reported. The spectral wavelength tuning range from 10.9 μm to 12.19 μm was designed for the transmission peak which is related to the glucose concentration. A tuning distance between top and bottom reflector of 2.25µm has been achieved, while maintaining a relatively low tuning voltage of 20V. The Tunable FP filter is the core part of glucose sensor and has other applications in Bio-sensor, hyperspectral imaging and tunable lasers, etc.