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Authors: Babak Hashemi 1 ; Sandro Rao 1 ; Maurizio Casalino 2 and Francesco Della Corte 3

Affiliations: 1 Department of Information Engineering Infrastructures and Sustainable Energy (DIIES), “Mediterranea” University Reggio Calabria, Italy ; 2 Institute of Applied Sciences and Intelligent Systems (ISASI) National Research Council (CNR) Naples, Italy ; 3 Department of Electrical Engineering and Information Technologies, Università degli Studi di Napoli Federico II, 80125 Naples, Italy

Keyword(s): Polarization-Independent, Single-Mode, SOI Waveguides, Amorphous Silicon.

Abstract: The conditions for simulating both single-mode behavior and polarization independence in deeply etched amorphous silicon (a-Si) on Silicon-On-Insulator (SOI) rib waveguides are presented and discussed. The paper aims to provide valuable insights and guidance for the design and optimization of waveguide-integrated electro-optic devices based on deeply etched hydrogenated amorphous silicon (a-Si:H)/SOI waveguides operating in a broad spectrum of wavelengths. The top layer of the waveguide consists of a-Si:H, whose deposition can be performed at low temperatures with no impact at all for previously fabricated CMOS-based electro-photonic integrated circuit.

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Paper citation in several formats:
Hashemi, B.; Rao, S.; Casalino, M. and Della Corte, F. (2024). Design and Simulation of Single-Mode and Polarization Independent Deeply Etched Amorphous Silicon on SOI Waveguides. In Proceedings of the 12th International Conference on Photonics, Optics and Laser Technology - PHOTOPTICS; ISBN 978-989-758-686-6; ISSN 2184-4364, SciTePress, pages 94-98. DOI: 10.5220/0012584200003651

@conference{photoptics24,
author={Babak Hashemi. and Sandro Rao. and Maurizio Casalino. and Francesco {Della Corte}.},
title={Design and Simulation of Single-Mode and Polarization Independent Deeply Etched Amorphous Silicon on SOI Waveguides},
booktitle={Proceedings of the 12th International Conference on Photonics, Optics and Laser Technology - PHOTOPTICS},
year={2024},
pages={94-98},
publisher={SciTePress},
organization={INSTICC},
doi={10.5220/0012584200003651},
isbn={978-989-758-686-6},
issn={2184-4364},
}

TY - CONF

JO - Proceedings of the 12th International Conference on Photonics, Optics and Laser Technology - PHOTOPTICS
TI - Design and Simulation of Single-Mode and Polarization Independent Deeply Etched Amorphous Silicon on SOI Waveguides
SN - 978-989-758-686-6
IS - 2184-4364
AU - Hashemi, B.
AU - Rao, S.
AU - Casalino, M.
AU - Della Corte, F.
PY - 2024
SP - 94
EP - 98
DO - 10.5220/0012584200003651
PB - SciTePress

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