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Authors: João M. Maia 1 ; Vítor A. Amorim 1 ; D. Alexandre 2 and P. V. S. Marques 1

Affiliations: 1 University of Porto and INESC TEC, Portugal ; 2 INESC TEC and University of Trás-os-Montes e Alto Douro, Portugal

Keyword(s): Optofluidics, Femtosecond Laser Direct Writing, Micromachining, Chemical Etching, Fused Silica.

Related Ontology Subjects/Areas/Topics: Photonic and Optoelectronic Materials and Devices ; Photonics ; Photonics, Optics and Laser Technology

Abstract: Micromachining with femtosecond laser can be exploited to fabricate optical components and microfluidic channels in fused silica, due to internal modification of the glass properties that is induced by the laser beam. In this paper, we refer to the formation of microfluidic channels, where an optimization of the fabrication procedure was conducted by examining etch rate and surface roughness as a function of the irradiation conditions. Microfluidic channels with high and uniform aspect ratio and with smooth sidewalls were obtained, and such structures were successfully integrated with optical components. The obtained results set the foundations towards the development of new optofluidic devices.

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Paper citation in several formats:
Maia, J.; Amorim, V.; Alexandre, D. and Marques, P. (2017). Fabrication of Microfluidic Channels by Femtosecond Laser Micromachining and Application in Optofluidics. In Proceedings of the 5th International Conference on Photonics, Optics and Laser Technology - PHOTOPTICS; ISBN 978-989-758-223-3; ISSN 2184-4364, SciTePress, pages 106-113. DOI: 10.5220/0006167401060113

@conference{photoptics17,
author={João M. Maia. and Vítor A. Amorim. and D. Alexandre. and P. V. S. Marques.},
title={Fabrication of Microfluidic Channels by Femtosecond Laser Micromachining and Application in Optofluidics},
booktitle={Proceedings of the 5th International Conference on Photonics, Optics and Laser Technology - PHOTOPTICS},
year={2017},
pages={106-113},
publisher={SciTePress},
organization={INSTICC},
doi={10.5220/0006167401060113},
isbn={978-989-758-223-3},
issn={2184-4364},
}

TY - CONF

JO - Proceedings of the 5th International Conference on Photonics, Optics and Laser Technology - PHOTOPTICS
TI - Fabrication of Microfluidic Channels by Femtosecond Laser Micromachining and Application in Optofluidics
SN - 978-989-758-223-3
IS - 2184-4364
AU - Maia, J.
AU - Amorim, V.
AU - Alexandre, D.
AU - Marques, P.
PY - 2017
SP - 106
EP - 113
DO - 10.5220/0006167401060113
PB - SciTePress

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