Authors:
Chen Wei
1
;
Luo Dong
2
;
Liang Yuanbo
3
;
Liu Peng
1
;
Chen Liangpei
1
and
Zhang Yizhou
1
Affiliations:
1
Shenzhen Institutes of Advanced Technology, Chinese Academy of Sciences, 1068 Xueyuan Avenue, Shenzhen and China
;
2
Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan and China
;
3
School of Microelectronics, Xidian University, Xi’an and China
Keyword(s):
Laser Scanner, Piezoelectric Actuators, Mechanical Cross Coupling, Hysteresis Compensation.
Related
Ontology
Subjects/Areas/Topics:
Optical Instrumentation
;
Optics
;
Photonics, Optics and Laser Technology
Abstract:
Traditional two-dimensional laser scanners usually employ two-degree-of-freedom flexible hinges. However, these flexible hinges suffer from mechanical cross coupling between axes, which will reduce the scanning accuracy and stability. To overcome the above disadvantages, a compact novel laser scanner based on piezoelectric actuators is presented. The scanner uses only three one-dimensional flexible hinges to achieve two-axis feature. The mechanical structure and principle are detailed. Then the capabilities of the scanner are tested by a performance test system. The test results show that the scanner has a tilt angle of 43.19 mrad for X-axis with resonance frequency at 149.21 Hz and 2.41 mrad for Y-axis with resonance frequency at 232.59 Hz. Its scanning nonlinearity is reduced from 3% to 0.5% for X-axis and from 6% to 1% after compensation. The test results and the actual scanning images prove the low mechanical cross coupling.