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Authors: Chen Wei 1 ; Luo Dong 2 ; Liang Yuanbo 3 ; Liu Peng 1 ; Chen Liangpei 1 and Zhang Yizhou 1

Affiliations: 1 Shenzhen Institutes of Advanced Technology, Chinese Academy of Sciences, 1068 Xueyuan Avenue, Shenzhen, China ; 2 Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan, China ; 3 School of Microelectronics, Xidian University, Xi’an, China

ISBN: 978-989-758-364-3

Keyword(s): Laser Scanner, Piezoelectric Actuators, Mechanical Cross Coupling, Hysteresis Compensation.

Abstract: Traditional two-dimensional laser scanners usually employ two-degree-of-freedom flexible hinges. However, these flexible hinges suffer from mechanical cross coupling between axes, which will reduce the scanning accuracy and stability. To overcome the above disadvantages, a compact novel laser scanner based on piezoelectric actuators is presented. The scanner uses only three one-dimensional flexible hinges to achieve two-axis feature. The mechanical structure and principle are detailed. Then the capabilities of the scanner are tested by a performance test system. The test results show that the scanner has a tilt angle of 43.19 mrad for X-axis with resonance frequency at 149.21 Hz and 2.41 mrad for Y-axis with resonance frequency at 232.59 Hz. Its scanning nonlinearity is reduced from 3% to 0.5% for X-axis and from 6% to 1% after compensation. The test results and the actual scanning images prove the low mechanical cross coupling.

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Paper citation in several formats:
Wei, C.; Dong, L.; Yuanbo, L.; Peng, L.; Liangpei, C. and Yizhou, Z. (2019). Two-dimensional Laser Scanner with Low Mechanical Cross Coupling based on Piezoelectric Actuators.In Proceedings of the 7th International Conference on Photonics, Optics and Laser Technology - Volume 1: PHOTOPTICS, ISBN 978-989-758-364-3, pages 129-133. DOI: 10.5220/0007360301290133

@conference{photoptics19,
author={Chen Wei. and Luo Dong. and Liang Yuanbo. and Liu Peng. and Chen Liangpei. and Zhang Yizhou.},
title={Two-dimensional Laser Scanner with Low Mechanical Cross Coupling based on Piezoelectric Actuators},
booktitle={Proceedings of the 7th International Conference on Photonics, Optics and Laser Technology - Volume 1: PHOTOPTICS,},
year={2019},
pages={129-133},
publisher={SciTePress},
organization={INSTICC},
doi={10.5220/0007360301290133},
isbn={978-989-758-364-3},
}

TY - CONF

JO - Proceedings of the 7th International Conference on Photonics, Optics and Laser Technology - Volume 1: PHOTOPTICS,
TI - Two-dimensional Laser Scanner with Low Mechanical Cross Coupling based on Piezoelectric Actuators
SN - 978-989-758-364-3
AU - Wei, C.
AU - Dong, L.
AU - Yuanbo, L.
AU - Peng, L.
AU - Liangpei, C.
AU - Yizhou, Z.
PY - 2019
SP - 129
EP - 133
DO - 10.5220/0007360301290133

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