Author:
Schubert Soãres
Affiliation:
Ultrafast Sensors, United States
Keyword(s):
Non-Contact Nano Metrology, Laser Triangulation, Optical Scatter, Machine Tool Error, Surface Topography, Edge Structure, Defect Geometry, Thin Films.
Related
Ontology
Subjects/Areas/Topics:
Optical Instrumentation
;
Optics
;
Photodetectors, Sensors and Imaging
;
Photonic and Optoelectronic Materials and Devices
;
Photonics
;
Photonics, Optics and Laser Technology
;
Spectroscopy, Imaging and Metrology
Abstract:
Optical and semiconductor products are fabricated utilizing industrial technology that is steadily progressing
to nanometre accurate operations. Reliable non-invasive contact-free sensors and techniques are required to
monitor in situ manufacturing parameters in parallel with product formation. The real-time evaluation and
analysis of precision fabrication processes could lead to intelligent, computerized, sensor-actuated
implementation, with automated compensating feedback loops to facilitate nanometre accuracy and
consistently provide high quality products in abundant yield. Laser triangulation is demonstrated herewith
as a versatile solution to simultaneously measure machine tool components and monitor the product in
process. Optically levered reflection resolved on a nanometre resolution displacement sensor, enables the
analysis of spindle axial and rotational error, stage linear error, the impact of these error-motion components
on a diamond tool edge and its progressio
n to wear, while inspecting the compliance of the product to the
desired surface finish and shape. Scanning optical scatterometry is utilized to image and analyse edges,
surfaces, defects, and thin film structure. This sensor technology is highly adaptable, and may be utilized in
scales ranging from small μm-size to large meter-size products manufactured from a variety of materials.
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