A SAFETY SYSTEM FOR DYNAMIC VACUUM LIQUID NITROGEN PIPELINE - For World Class Manufacturing Operation in Semiconductor Industry

Vinayak Divate, Pichit Saengpongpaew

2006

Abstract

Liquid nitrogen is a colourless, odourless, extremely cold liquid and gas under pressure. It can cause rapid suffocation when concentrations are sufficient to reduce oxygen levels below 19.5%. Contact with liquid or cold vapors can cause severe frostbite. One volume of liquid nitrogen will expand to produce 696.5 equivalent volumes of gas. With this background Ln2 is being used in Semiconductor industry especially in testing operation. The cold tests are taken on products at a temp up to -40C to -60C. The Ln2 is used in testing machine to reduce test handler chamber temp. The chamber temp is required to maintain at -40 C with allowance of + or – 3C to get accurate results. So this paper describes how Dynamic Vacuum ln2 pipeline system can be maintained smartly to get maximum benefits with minimum unscheduled shutdown in semiconductor industry. This paper also gives the details about the safety system developed at SPANSION Thailand limited for handling of ln2 through Dynamic vacuum ln2 pipeline system.

Paper Citation

in Harvard Style

Divate V. and Saengpongpaew P. (2006). A SAFETY SYSTEM FOR DYNAMIC VACUUM LIQUID NITROGEN PIPELINE - For World Class Manufacturing Operation in Semiconductor Industry . In Proceedings of the Third International Conference on Informatics in Control, Automation and Robotics - Volume 3: ICINCO, ISBN 978-972-8865-61-0, pages 148-153. DOI: 10.5220/0001210401480153

in Bibtex Style

@conference{icinco06,
author={Vinayak Divate and Pichit Saengpongpaew},
title={A SAFETY SYSTEM FOR DYNAMIC VACUUM LIQUID NITROGEN PIPELINE - For World Class Manufacturing Operation in Semiconductor Industry},
booktitle={Proceedings of the Third International Conference on Informatics in Control, Automation and Robotics - Volume 3: ICINCO,},
year={2006},
pages={148-153},
publisher={SciTePress},
organization={INSTICC},
doi={10.5220/0001210401480153},
isbn={978-972-8865-61-0},
}

in EndNote Style

TY - CONF
JO - Proceedings of the Third International Conference on Informatics in Control, Automation and Robotics - Volume 3: ICINCO,
TI - A SAFETY SYSTEM FOR DYNAMIC VACUUM LIQUID NITROGEN PIPELINE - For World Class Manufacturing Operation in Semiconductor Industry
SN - 978-972-8865-61-0
AU - Divate V.
AU - Saengpongpaew P.
PY - 2006
SP - 148
EP - 153
DO - 10.5220/0001210401480153