Heterodyne Interferometer for In-plane and Out-of-plane Displacement Measurements

Hung-Lin Hsieh, Wei-Cheng Wang, Ssu-Wen Pan

2013

Abstract

An innovative interferometer based on the heterodyne interferometry, grating shearing interferometry, and Michelson interferometry for precise displacement measurement is proposed. The system configuration is simple and easy to set-up. A heterodyne light beam is generated by using an Electro-Optic Modulating (EOM) technique for amplitude modulation. While the heterodyne light beam normally passes through a semi-transmission diffraction grating, the reflection part (Michelson interferometry) for out-of-plane displacement detection and the diffraction part (Grating interferometry) for in-plane displacement detection can then be obtained. The experimental results demonstrate the system has the capability of providing two-dimensional displacement information simultaneously. The measurement resolution and range can achieve to nanometer and millimeter levels.

References

  1. Zajtchuk R., 1999. “New technologies in medicine: biotechnology and nanotechnology” Disease a-Month, Volume 45, Issue 11, PP453-495.
  2. B, Yu, M. Meyyappan, 2006 “Nanotechnology: Role in emerging nanoelectronics” Solid-State Electronics, Volume 50, Issue 4, PP536-544.
  3. G. Lérondel, A. Sinno, L. Chassagne, S. Blaize, P. Ruaux, A. Bruyant, S. Topçu, P. Royer, Y. Alayli, 2009 “Enlarged near-field optical imaging” Applied Physics, Volume 106, Issue 4, PP 044913 - 044913-4.
  4. J. Zhao, M. Kunieda, G. Yang, X. Yuan, 2010 “The Application of Nanotechnology for Mechanical Manufacturing,” Key Engineering Materials, Volumes 447 - 448, PP86-90.
  5. L. Thillya, S. Petegemb, P. Renaulta, F. Lecouturierc, V. Vidald, B. Schmittb, H. Swygenhovenb, 2009 “A new criterion for elasto-plastictransition in nanomaterials: Application to size and composite effects on CuNbnanocompositewires,” Acta Materialia, Volume 57, Issue 11, PP3157-3169.
  6. J. Li, Y. Lu, M. M, 2006 “Nano Chemical Sensors with Polymer-Coated Carbon Nanotubes,” IEEE Sensors Journal, Volume 6, Issue 5, PP 1047-1051.
  7. H. L. Hsieh, 2011 “Novel interferometric stage based on quasi-common-optical-path configuration for large scale displacement,” doctoral thesis.
  8. G. R. Witt, 1974 “Thin solid film,” Thin Solid Films Volume 22, Issue 2, pp133-156.
  9. H. Miyajima, E. Yamamoto, K. Yanagisawa, 1998” Optical micro encoder with sub-micron resolution using a VCSEL” Sensors and Actuators A: Physical, Volume 71, Issue 3 pp213-218.
  10. D. C. Su, M. H. Chiu, and C. D. Chen, 1996 "Simple twofrequency laser," Precis. Eng. 18, 161-163.
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Paper Citation


in Harvard Style

Hsieh H., Wang W. and Pan S. (2013). Heterodyne Interferometer for In-plane and Out-of-plane Displacement Measurements . In Proceedings of the International Conference on Photonics, Optics and Laser Technology - Volume 1: PHOTOPTICS, ISBN 978-989-8565-44-0, pages 56-62. DOI: 10.5220/0004340300560062


in Bibtex Style

@conference{photoptics13,
author={Hung-Lin Hsieh and Wei-Cheng Wang and Ssu-Wen Pan},
title={Heterodyne Interferometer for In-plane and Out-of-plane Displacement Measurements},
booktitle={Proceedings of the International Conference on Photonics, Optics and Laser Technology - Volume 1: PHOTOPTICS,},
year={2013},
pages={56-62},
publisher={SciTePress},
organization={INSTICC},
doi={10.5220/0004340300560062},
isbn={978-989-8565-44-0},
}


in EndNote Style

TY - CONF
JO - Proceedings of the International Conference on Photonics, Optics and Laser Technology - Volume 1: PHOTOPTICS,
TI - Heterodyne Interferometer for In-plane and Out-of-plane Displacement Measurements
SN - 978-989-8565-44-0
AU - Hsieh H.
AU - Wang W.
AU - Pan S.
PY - 2013
SP - 56
EP - 62
DO - 10.5220/0004340300560062