![](bg5.png)
Figure 10: The layout of the tunable FP filter.
2.5 Testing System
In order to control the voltage between the top and
bottom capacitor planes, a Korad voltage supply
KA6003P can be used as reference. The voltage
supply is a programmable single-channel, constant-
voltage power supply with low noise, high reliability
and high accuracy.
The glucose sensor system consists of a voltage
supply, tunable FP filter, detector, testing circuit,
and PC as shown in Fig. 11. The reference detector
is a thermopile detector MLX90614 from Melexis.
The MLX90614 is an Infrared thermometer for non-
contact temperature measurements. Both the IR
sensitive thermopile detector chip and the signal
conditioning ASIC are integrated in the same TO-39
can.
Evaluation board EVB90614 from Melexis is
used as the testing circuit which includes an easy
interface between the MLX90614 infrared
thermometer in TO-can and a PC.
Figure 11: The schematic of glucose sensor system.
3 CONCLUSIONS
In summary, a tunable MEMS Fabry-Pérot filter for
the Long-Wave Infrared range is proposed and
simulated. By applying a voltage ranging from 0 V
to 20 V, the tuning range of output transmission
peak shift from 10.9 µm to 12.19 µm is obtained.
The tunable FP filter is the key part of glucose
sensor and has other applications in hyperspectral
imaging, spectrometers, telecommunication and
light sources, etc.
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