Design of Mobile Microrobots with Thermomechanical Actuators
N. N. Bolotnik, V. G. Chashchukhin, V. G. Gradetsky, D. V. Kozlov, I. P. Smirnov, A. N. Sukhanov, A. A. Zhukov
2015
Abstract
A design concept of a legged mobile microrobot that utilizes thermomechanical actuators is discussed. The forces and torques acting on the legs of the microrobot are identified and analyzed. The phases of motion, conditions of motion, and sequences of operations are defined; the performance characteristics of the robots are studied. A number of design schematics of the microrobot are presented and compared. The issues related to the mechanical structure of the robots, as well as the content and amount of information required by the measurement and control systems are considered. A modified thermomechanical actuator was developed for the microrobot leg. The structure of the actuator involves a feedback sensor. The design sketches of the inspector microrobot with an on-board micromanipulator based on the thermomechanical actuator are proposed. Possible applications of the microrobot for aerospace planet missions are discussed. This study was supported by the Russian Science Foundation (Grant #14-19-00949).
References
- Erdem E. Y., Chen Y. M., Mohebbi M., Darling R. B., Böhringer K. F., Suh J. W., Kovacs G. T., 2010 A Thermally Actuated Omnidirectional Walking Microrobot. Journal of Microelectromechanical Systems; 19 (3), p.433-442.
- Ebefors T., Mattson J. U., Kälvesten E., Stemme G., 1999 A walking silicon miro-robot // The 10th Int. Conference on Solid-State Sensors and Actuators (Transducers'99) - Sendai, Japan., p. 1202-1205.
- Patent of USA US2012/0168233. Robotic devices and methods / J.V. Clark (US); Purdue research foundation (US) - Publ. 05.07.2012 - 8p.
- Patent of USA US2010/0145511. Microcrawler and conveyor robots, controllers, systems, and methods / D.O. Popa (US), R. Murthy (US), A.N. Das (US); Fulbright&Jaworski L.L.P. (US). Publ. 10.06.2010, p.17.
- The MEMS Handbook, 2002 Edited by Mohamed God-elHak. Mechanical engineering handbook series, CRC Press, USA, p. 26-63, 26-27.
- Harc J. Madou. , 2002 Fundamentals of Microfabrication. The Science of Miniaturization. Second Edition. CRC Press, USA, 723 pp.
- Patent of Russia RU2518258. Microsystem device for temperature control of surface of spacecraft / A.A. Zhukov (RU), I. P. Smirnov (RU), A. S. Selivanov (RU), D. V. Kozlov (RU), I. V. Churilo (RU). Publ. 10.06.2014, Bull. ? 16, 16 p.
- Wallace B. P., Hampton P. J., Bradley C. H., Conan R., 2006 Evaluation of a MEMS Deformable Mirror for an Adaptive Optics Test Bench // Opt. Express.. ? 14(22). P. 10132-10138.
- Patent of Russia RU2456720. Microsystem apparatus controlling surface for mounting small antenna /A. A. Zhukov (RU), I. P. Smirnov (RU), A. S. Korpukhin (RU), D.V. Kozlov (RU). Publ. 20.07.2012, Bull. ? 20, 15 p.
- Norton A., Evans J., Gave D. et al., 2009 Preliminary Characterization of Boston Micromachines' 4096- actuator Deformable Mirror // MEMS Adaptive Optics III. Proc. SPIE. V. 7209. P. 720901-720901-7.
- Ebefors T., Mattson J. U., Kalvesten E., Stemme G. , 1999 A Walking Silicon Micro-robot // The 10th Int. Conf. on Solid-State Sensors and Actuators (Transducers' 99). Sendai, Japan. P. 1202-1205.
- Ebefors T., 2000 Polyimide V-groove Joints for Threedimensional Silicon Transducers // Thesis for the Degree of Doctor of Philosophy at the Royal Institute of Technology. Stockholm, Sweden. 143 p.
- Patent of Russia RU2448896. Thermal micromechanical actuator and method of making said actuator / A. A. Zhukov (RU), I. P. Smirnov (RU), A. S. Korpukhin (RU), D.V. Kozlov (RU), P.G. Babaevsky (RU). Publ. 27.04.2012, Bull. ? 12, 20 p.
- Bolotnik N. N., Gradetsky V. G., Kozlov D. V., Smirnov I. P., Chashchukhin V. G., 2015 Physical characteristics of the sensing elements of feedback sensors combined with thermomechanical actuators for plant micromotion control systems. Journal of Computer and Systems Science International, Vol. 54, No 1, pp. 140-150.
- Gradetsky V. G., Knyazkov M. M., Fomin L. F., Chashchukhin V.G., 2010 Miniature robot mechanics. Nauka, Moscow (in Russian).
- Kozlov D. V., Smirnov I. P., Korpukhin A. S., Zhukov A. A., Babaevsky P. G., Suchorukov A. G. , 2010 Estimation of influence of multicycle bending on thermal deformation characteristics of elastic-hinged beams of thermal microactuators. Nano- and Microsystem Technology, No 12, p. 22-25.
- Korpukhin A. S., Babaevsky P. G., Zhukov A. A., Kozlov D.V., Smirnov I.P., 2011 Influence of forming conditions and layer width on thermodeformation characteristics of polyimide-silicon elastic-hinged beams of thermal actuators. Nano- and Microsystem Technology, No 2. pp. 34-40.
- Xu T. B., Cheng Z. Y., Zhang O. M., 2002 Highperfomance micromachined unimorph actuators based on electrostrictive poly(vinylidenc fluoridetrifluoroethylenc) copolymer. Applied physics letters, v. 80, #6, pp. 1082-1084.
- Yang W. M., Chou S. K., Shu C., Li Z. W., Xue H., 2002 Development of microthermophotovoltaic system. Applied physics letters, v.81, #27, pp. 5255-5257.
- Fahrner W. R., Job R., Werner M., 2001 Sensors and smart electronic in harch environment applications. Microsystem Technologies 7(2001), Springer-Verlag, pp. 138-144.
- Kondon Y., Yokota S., 1997 Micro in-pipe mobile machines by making use an electro-rheological fluid. Proc. IROS-97, pp. 1672-1677.
Paper Citation
in Harvard Style
N. Bolotnik N., G. Chashchukhin V., G. Gradetsky V., V. Kozlov D., P. Smirnov I., N. Sukhanov A. and A. Zhukov A. (2015). Design of Mobile Microrobots with Thermomechanical Actuators . In Proceedings of the 12th International Conference on Informatics in Control, Automation and Robotics - Volume 2: ICINCO, ISBN 978-989-758-123-6, pages 252-258. DOI: 10.5220/0005527602520258
in Bibtex Style
@conference{icinco15,
author={N. N. Bolotnik and V. G. Chashchukhin and V. G. Gradetsky and D. V. Kozlov and I. P. Smirnov and A. N. Sukhanov and A. A. Zhukov},
title={Design of Mobile Microrobots with Thermomechanical Actuators},
booktitle={Proceedings of the 12th International Conference on Informatics in Control, Automation and Robotics - Volume 2: ICINCO,},
year={2015},
pages={252-258},
publisher={SciTePress},
organization={INSTICC},
doi={10.5220/0005527602520258},
isbn={978-989-758-123-6},
}
in EndNote Style
TY - CONF
JO - Proceedings of the 12th International Conference on Informatics in Control, Automation and Robotics - Volume 2: ICINCO,
TI - Design of Mobile Microrobots with Thermomechanical Actuators
SN - 978-989-758-123-6
AU - N. Bolotnik N.
AU - G. Chashchukhin V.
AU - G. Gradetsky V.
AU - V. Kozlov D.
AU - P. Smirnov I.
AU - N. Sukhanov A.
AU - A. Zhukov A.
PY - 2015
SP - 252
EP - 258
DO - 10.5220/0005527602520258