only constituted by defocusing and astigmatism can
be written as (Born and Wolf, 1999)
22
01 2 3 4 5
(, )Wxy a ax ay ax axy ay=+ + + + +
(1)
Then the x-slope measurement S
x
and y-slope
measurement S
y
in Catesian coordinates are
(Hernández-Gómez et al., 2014)
134
24 5
(, )
2
(, )
2
x
y
Wxy
Saaxay
x
Wxy
Saaxay
y
∂
==++
∂
∂
==++
∂
(2)
Then the a
1
~a
5
can be obtained from following matrix
equations
1
3
4
1 2
1 2
1 2
i
j
k
x
ii
xjj
kk
x
S
xy
a
Sx
a
a
xy
S
=
(3)
And
2
4
5
1 2
1 2
1 2
i
j
k
y
ii
yjj
kk
y
S
xy
a
Sxya
a
xy
S
=
(4)
Where, x and y are the coordinates of focusing points,
the indexs i,j,k are signed as radom three different
point, respectively. In Eq. (1) there are 5 unknown
parameters a
1
~a
5
which are completely discribe the
spherical curvature and the astigmatic curvature.
Based on the Zernike circle polynomials
()cos
m
n
rm
θ
that are orthogonal and normalized (Born and Wolf,
1999), the relationship between a
1
~a
5
and Zernike
circle polynomials coefficients can be obtain by
00
1, 1 1 1,1 2
222
000
2,0 3 5 2, 2 3 5 2,0
;;
22
(); ();
43 26 43
AaAa
aaA aaA
−
−
==
=+ =−=
(5)
Where, A
-1,-1
and A
1,1
are tilt abberation
coefficients, A
2,0
is defocus abberation coefficient,
A
2,-2
and A
2,2
are astigmatism abberation coefficients,
ρ
0
is the normalization radius. So for calculating the
defocus aberrations coefficient and astigmatism
aberrations coefficients, we need at least 3 sets of the
x- and y- slopes measurements. In this case LOWAD
is designed to detect displaces of six focus for
measuring beam, which means there are six sets of x-
and y- slopes measurements. From Eq. (3) and Eq.
(4), we notice that there are 20 different sets of values
for a
1
, a
2
, a
3
, and a
5
. The final value is taken as the
average of the 20 values. We have 40 results for a
4
,
two in each combination of three points, so we take
the average of these 40 values. Once the values of
a
1
~a
5
are calaculated, the Zernike abberation
coefficients of wavefront distortions can be obtained
by Eq. (5).
3 DESIGN AND ANALYSIS
The LOWAD mainly include three parts: one sepcial
diaphragm (Part A), six sets of optical focusing
system (Part B) and six displacement detectors. The
design schematic in cross section view is shown in
Figure 1. Measuring beam is divided to 6 sub-beams
by the sepcial diaphragm, each sub-beam is focused
by focusing optical system, then the displacement of
focal spots can be detected by displacement detectors.
The x- and y- slopes of focal spot can be calculated
by using the focal length of focusing system and the
dispalcement of each focal spot (Tyson, 2011).
Figure 1: Structure diagram of LOWAD.
The distribution of sepcial diaphragm is shown in
Figure 2. In our case, the diameter of incient light
D=150mm, the diameter of each separated circular
area d=25mm, and the distance of ench adjacent
points is ρ
0
=50mm. This diaphragm can separate the
incient light into six sub- lights, and each sub-light
contains the phase information of confirmatory
portion of incident light. As the same as SHWS, we
must focus each sub- lights and measure the relative
displacement of focal points, respectively.
In order to reduce the size of this device and
increase the measurement accuracy, as shown in
Figure 3, we use the focusing optical system rather
than convex lens. The whole focusing system include
2 parts: the first part contains one convex lens (L1)