The Temperature Control System of Continuous Diffusion Furnace

Xianxin Ke, Zhitong Luo, Yujiao Zhu, Yang Liu

2016

Abstract

The diffusion furnace is an important and indispensable equipment in the production process of solar cell，it plays a crucial role in the photoelectric conversion efficiency of the solar cell. Production efficiency and temperature control precision of traditional closed diffusion furnace is low. To solve this problem，this paper presents a temperature control system of continuous diffusion furnace. The system uses PID cascade control algorithm based on Smith estimating pre-compensation to achieve the temperature control of furnace and ensure the uniformity and stability of the temperature, so as to ensure the uniformity of the dopant diffusion. The simulation results verify the effectiveness of the control algorithm; and practical experiments prove the feasibility of the temperature control system.

References

  1. Cao, S. G., Zheng, W. H., Xiao, L. 2013. Development status and development trend of diffusion equipment, Machinery, Vol. 585, pp.69-71.
  2. Wang, R., Wu, X. M., Xu, Z., Yuan, J. B., Sun, Y. Z., Yi, S. 2012. Electrical properties of strained Si p-n junctions, 2012 IEEE 11th International Conference on Solid-State and Integrated Circuit Technology (ICSICT-2012). Beijing China, pp.1079-1081.
  3. GERVINI, Victor Trigon, PERONDI, Eduardo André. 2014. Cascade Control of a Pneumatic Servo Positioning System using Neural Networks, 2014 2nd International Conference on Manufacturing Engineering and Technology for Manufacturing Growth (METMG 2014). USA, Vol. 902, pp. 225-230.
  4. Ma, G. Y., Jia, J. R, Bo, J. Q. 2014. The design of a controller with Smith predictor for networked control systems with long time delay, 2014 IMSS International Conference on Future Mechatronics and Automation (ICMA 2014 V1), Beijing China, vol. 909, PP.317-322.
  5. Anonymous. 2008. Cimetrix provides connectivity solution to centrotherm for semiconductor & solar cell manufacturing, Electronics Business Journal.
  6. Yan, X. W., Zhang, J. G., Deng, B., Yuan, Y. H., Pan, X. C., Yang, Y. B. 2012. Application and Development Trend of the LTCC Sintering Furnaces, Equipment for Electronic Products Manufacturing, vol. 2, PP.1-4.
  7. Olsen, T. 2012. Key Considerations for Selection of Diffusion Furnaces, 2012 19th Biennial University/Government/Industry, Micro/Nano Symposium (UGIM), Berkeley, CA, 2012: 1.
  8. CHEN, S. D., ZHANG, Y., WANG, J., ZHAO, H. 2013. Connection between heat diffusion and heat conduction in one-dimensional system, Xiamen University.
  9. Song, Y. M., Bin, Y. 2012. Predictive Functional Cascade Temperature Control for Bench-Scale Batch Reactor, The 31st Chinese Control Conference (CCC), Hefei China, pp.4079-4084.
  10. Lai, Chien-Liang, Hsu, Pau-Lo. 2010. Design the remote control system with the time-delay estimator and the adaptive smith predictor, IEEE, vol.1, pp.73-80.
  11. Xu, G., Lin, Y. S., Hu, T. S., Chen, L. 2013. Application of virtual instrument technology in temperature acquisition system, Journal of Wuhan Institute of Technology, vol. 7, pp.81-86.
Download


Paper Citation


in Harvard Style

Ke X., Luo Z., Zhu Y. and Liu Y. (2016). The Temperature Control System of Continuous Diffusion Furnace . In Proceedings of the 13th International Conference on Informatics in Control, Automation and Robotics - Volume 1: ICINCO, ISBN 978-989-758-198-4, pages 227-233. DOI: 10.5220/0005996402270233


in Bibtex Style

@conference{icinco16,
author={Xianxin Ke and Zhitong Luo and Yujiao Zhu and Yang Liu},
title={The Temperature Control System of Continuous Diffusion Furnace},
booktitle={Proceedings of the 13th International Conference on Informatics in Control, Automation and Robotics - Volume 1: ICINCO,},
year={2016},
pages={227-233},
publisher={SciTePress},
organization={INSTICC},
doi={10.5220/0005996402270233},
isbn={978-989-758-198-4},
}


in EndNote Style

TY - CONF
JO - Proceedings of the 13th International Conference on Informatics in Control, Automation and Robotics - Volume 1: ICINCO,
TI - The Temperature Control System of Continuous Diffusion Furnace
SN - 978-989-758-198-4
AU - Ke X.
AU - Luo Z.
AU - Zhu Y.
AU - Liu Y.
PY - 2016
SP - 227
EP - 233
DO - 10.5220/0005996402270233