Research of Thin Film Thermocouple Based on MEMS for Temperature Measurement on Spacecraft Surface

Zhenwei Li, Zeyuan Liu, Chang Liu, Fang Han

2018

Abstract

The paper introduces the technology of MEMS and its advantages in the manufacture of aerospace sensors. According to the requirements of spacecraft surface temperature measurement, a K-type (NiCr/NiSi) thin film thermocouple is designed. The graphic process design of thin film thermocouple is studied, including thermal junction and thin film lead wires. The test shows that the response time of the thin film thermocouple is shorter and the relative error is smaller compared with the traditional thermocouple.

Paper Citation

in Harvard Style

Li Z., Liu Z., Liu C. and Han F. (2018). Research of Thin Film Thermocouple Based on MEMS for Temperature Measurement on Spacecraft Surface.In 3rd International Conference on Electromechanical Control Technology and Transportation - Volume 1: ICECTT, ISBN 978-989-758-312-4, pages 522-528. DOI: 10.5220/0006973605220528

in Bibtex Style

@conference{icectt18,
author={Zhenwei Li and Zeyuan Liu and Chang Liu and Fang Han},
title={Research of Thin Film Thermocouple Based on MEMS for Temperature Measurement on Spacecraft Surface},
booktitle={3rd International Conference on Electromechanical Control Technology and Transportation - Volume 1: ICECTT,},
year={2018},
pages={522-528},
publisher={SciTePress},
organization={INSTICC},
doi={10.5220/0006973605220528},
isbn={978-989-758-312-4},
}

in EndNote Style

TY - CONF

JO - 3rd International Conference on Electromechanical Control Technology and Transportation - Volume 1: ICECTT,
TI - Research of Thin Film Thermocouple Based on MEMS for Temperature Measurement on Spacecraft Surface
SN - 978-989-758-312-4
AU - Li Z.
AU - Liu Z.
AU - Liu C.
AU - Han F.
PY - 2018
SP - 522
EP - 528
DO - 10.5220/0006973605220528