Surface Texture of Thin Gallium Nitride Grown on Closed to Van Der Wall Layer of Molybdenum Disulfide

Iwan Susanto, Ing-Song Yu, Dianta Mustofa Kamal, Belyamin, Fuad Zainuri, Sulaksana Permana, Sulaksana Permana, Chi-Yu Tsai, Yen-Ten Ho, Ping-Yu Tsai

2019

Abstract

A comprehensive analysis of surface texture of gallium nitride (GaN) films grown on the MoS2 layer via plasma-assisted molecular beam epitaxy was performed. Scanning electron microscopy (SEM) was used to explore the surface morphology of GaN films. The smooth surface with attending the amount of Ga particle created on the GaN films. The great of Ga-N bonding elements more than 80 % explored by XPS core level (CL) 3d Ga was also obtained in the GaN films. Moreover, investigating the results of surface contour by atomic force microscopic (AFM) exhibited a smoother surface texture with RMS of 2.17 nm for scan area 3 x 3 µm. Finally, the higher growth temperature served by substrate could facilitate the smoother surface with the minimum of Ga metallic.

Paper Citation

in Harvard Style

Susanto I., Yu I., Kamal D., Belyamin., Zainuri F., Permana S., Tsai C., Ho Y. and Tsai P. (2019). Surface Texture of Thin Gallium Nitride Grown on Closed to Van Der Wall Layer of Molybdenum Disulfide. In Proceedings of the 8th Annual Southeast Asian International Seminar - Volume 1: ASAIS, ISBN 978-989-758-468-8, pages 22-26. DOI: 10.5220/0009870400002905

in Bibtex Style

@conference{asais19,
author={Iwan Susanto and Ing-Song Yu and Dianta Mustofa Kamal and Belyamin and Fuad Zainuri and Sulaksana Permana and Chi-Yu Tsai and Yen-Ten Ho and Ping-Yu Tsai},
title={Surface Texture of Thin Gallium Nitride Grown on Closed to Van Der Wall Layer of Molybdenum Disulfide},
booktitle={Proceedings of the 8th Annual Southeast Asian International Seminar - Volume 1: ASAIS,},
year={2019},
pages={22-26},
publisher={SciTePress},
organization={INSTICC},
doi={10.5220/0009870400002905},
isbn={978-989-758-468-8},
}

in EndNote Style

TY - CONF

JO - Proceedings of the 8th Annual Southeast Asian International Seminar - Volume 1: ASAIS,
TI - Surface Texture of Thin Gallium Nitride Grown on Closed to Van Der Wall Layer of Molybdenum Disulfide
SN - 978-989-758-468-8
AU - Susanto I.
AU - Yu I.
AU - Kamal D.
AU - Belyamin.
AU - Zainuri F.
AU - Permana S.
AU - Tsai C.
AU - Ho Y.
AU - Tsai P.
PY - 2019
SP - 22
EP - 26
DO - 10.5220/0009870400002905