A Study on Double-sided Optical Focusing Alignment of Transparent Substrate

Chia-Lien Ma, Chih-Chung Yang, Yu-Hsuan Lin, Kuo-Cheng Huang

2020

Abstract

The non-contact optical focus positioning technology proposed in this study uses the principle of optical imaging to develop a system that is simple, fast, and has a microscopic image inspection function. This study uses a dual optical path design for the upper and lower systems. The near-semi-reflective substrates in the system have different reflectivity coatings. The energy density of the transmitted and reflected light is captured through image processing. The position shift or tilt of the components is then used to calculate the energy density difference of the upper and lower systems. It can be quickly converted into focus position, system uniformity, surface height, component assembly offset and tilt. The technology of this research can overcome the problems of manual focus, additional device focus module and human eye misjudgement, and provide a measurement method and tool with simple operation and high accuracy. It can effectively adjust the Z-axis offset range of the lower system can be effectively adjusted by ±1 mm, the lower system tilts range ±1 ̊, and the substrate tilts range ±1 by the difference of the upper and lower energy densities. The Y-axis offset range is ±0.1 mm by the maximum energy density of the upper system.

Paper Citation

in Harvard Style

Ma C., Yang C., Lin Y. and Huang K. (2020). A Study on Double-sided Optical Focusing Alignment of Transparent Substrate. In Proceedings of the 8th International Conference on Photonics, Optics and Laser Technology - Volume 1: PHOTOPTICS, ISBN 978-989-758-401-5, pages 80-85. DOI: 10.5220/0008915500800085

in Bibtex Style

@conference{photoptics20,
author={Chia-Lien Ma and Chih-Chung Yang and Yu-Hsuan Lin and Kuo-Cheng Huang},
title={A Study on Double-sided Optical Focusing Alignment of Transparent Substrate},
booktitle={Proceedings of the 8th International Conference on Photonics, Optics and Laser Technology - Volume 1: PHOTOPTICS,},
year={2020},
pages={80-85},
publisher={SciTePress},
organization={INSTICC},
doi={10.5220/0008915500800085},
isbn={978-989-758-401-5},
}

in EndNote Style

TY - CONF

JO - Proceedings of the 8th International Conference on Photonics, Optics and Laser Technology - Volume 1: PHOTOPTICS,
TI - A Study on Double-sided Optical Focusing Alignment of Transparent Substrate
SN - 978-989-758-401-5
AU - Ma C.
AU - Yang C.
AU - Lin Y.
AU - Huang K.
PY - 2020
SP - 80
EP - 85
DO - 10.5220/0008915500800085