Novel Fabrication Method of Minute Cylindrical Structures Such as Stents using Lithography, Etching, and Chemical Polishing

Toshiyuki Horiuchi, Kaiki Ito, Jun-ya Iwasaki, Hiroshi Kobayashi

2020

Abstract

Applicability of characteristic subtractive processes of stainless-steel pipes to fabrication of minute structures such as stents was demonstrated. Pipes with an outer diameter of 2 mm, a thickness of 50 µm, and a length of 50 mm were coated with a resist PMER N-CA3000 PM in approximately 10 µm thick in 20 mm area at the tip parts of pipes. Next, stent-like mesh patterns composed of 30 rhombuses on an ordinary flat film reticle were replicated on a pipe using a rotary scan-projection exposure system, in which patterns were precisely and homogeneously replicated by synchronously scanning the reticle linearly in perpendicular to the pipe axis and rotating the pipe at a constant speed. All the patterns on the reticle were continuously replicated during the pipe was rotated 360º. After printing the stent-like mesh patterns, the pipes were processed in two steps. In the first step, they were wetly etched in FeCl3 aqueous solution, and in the second step, they were chemically polished in a chemical compound on the market. As a result, a stent-like meshed pipe with mesh widths of 83±6 µm was precisely fabricated.

Paper Citation

in Harvard Style

Horiuchi T., Ito K., Iwasaki J. and Kobayashi H. (2020). Novel Fabrication Method of Minute Cylindrical Structures Such as Stents using Lithography, Etching, and Chemical Polishing. In Proceedings of the 13th International Joint Conference on Biomedical Engineering Systems and Technologies (BIOSTEC 2020) - Volume 1: BIODEVICES; ISBN 978-989-758-398-8, SciTePress, pages 169-175. DOI: 10.5220/0008997201690175

in Bibtex Style

@conference{biodevices20,
author={Toshiyuki Horiuchi and Kaiki Ito and Jun-ya Iwasaki and Hiroshi Kobayashi},
title={Novel Fabrication Method of Minute Cylindrical Structures Such as Stents using Lithography, Etching, and Chemical Polishing},
booktitle={Proceedings of the 13th International Joint Conference on Biomedical Engineering Systems and Technologies (BIOSTEC 2020) - Volume 1: BIODEVICES},
year={2020},
pages={169-175},
publisher={SciTePress},
organization={INSTICC},
doi={10.5220/0008997201690175},
isbn={978-989-758-398-8},
}

in EndNote Style

TY - CONF

JO - Proceedings of the 13th International Joint Conference on Biomedical Engineering Systems and Technologies (BIOSTEC 2020) - Volume 1: BIODEVICES
TI - Novel Fabrication Method of Minute Cylindrical Structures Such as Stents using Lithography, Etching, and Chemical Polishing
SN - 978-989-758-398-8
AU - Horiuchi T.
AU - Ito K.
AU - Iwasaki J.
AU - Kobayashi H.
PY - 2020
SP - 169
EP - 175
DO - 10.5220/0008997201690175
PB - SciTePress