A High Stroke Actuator Micro-mirror Array Designed for Adaptive Optics

Quan Sun, Quan Sun, Quan Sun, Baozhu Yan, Baozhu Yan, Baozhu Yan, Yi Yang, Yi Yang, Yi Yang

2020

Abstract

A micro-mirror with large out-of-plane displacement actuator with three polysilicon layers fabrication process is designed for adaptive optics application. The optimized micro-mirror actuating structure consists of three individual levers, each of which is actuated by electrostatic attractive force with the plane-parallel structure to produce a large upward displacement at the end of the long arm of the lever with the lever principle. Finite element analysis (FEA) models are built to calculate the maximum upward displacement of the long arm. The actuator with 320 um long arm and 80 um short arm were designed by 2um thick Poly1 layer, while the electrodes were designed by Poly0 and mirror plate was designed by Poly2 with a polish process afterwards. The micro-mirrors can be tightly arranged in a hexagonal array to be applied in adaptive optics (AO) system as a deformable mirror. An AO simulation system is built to test the aberration correction effect of the micromirror array. The results showed that the 61 micro-mirror array is better than 37 micro-mirror array in aberration correction, which showed good application prospect of this high stoke micro-mirror array in AO systems.

Paper Citation

in Harvard Style

Sun Q., Yan B. and Yang Y. (2020). A High Stroke Actuator Micro-mirror Array Designed for Adaptive Optics. In Proceedings of the 8th International Conference on Photonics, Optics and Laser Technology - Volume 1: PHOTOPTICS, ISBN 978-989-758-401-5, pages 168-173. DOI: 10.5220/0009171501680173

in Bibtex Style

@conference{photoptics20,
author={Quan Sun and Baozhu Yan and Yi Yang},
title={A High Stroke Actuator Micro-mirror Array Designed for Adaptive Optics},
booktitle={Proceedings of the 8th International Conference on Photonics, Optics and Laser Technology - Volume 1: PHOTOPTICS,},
year={2020},
pages={168-173},
publisher={SciTePress},
organization={INSTICC},
doi={10.5220/0009171501680173},
isbn={978-989-758-401-5},
}

in EndNote Style

TY - CONF

JO - Proceedings of the 8th International Conference on Photonics, Optics and Laser Technology - Volume 1: PHOTOPTICS,
TI - A High Stroke Actuator Micro-mirror Array Designed for Adaptive Optics
SN - 978-989-758-401-5
AU - Sun Q.
AU - Yan B.
AU - Yang Y.
PY - 2020
SP - 168
EP - 173
DO - 10.5220/0009171501680173