Design and Simulation of Single-Mode and Polarization Independent Deeply Etched Amorphous Silicon on SOI Waveguides

Babak Hashemi, Sandro Rao, Maurizio Casalino, Francesco Della Corte

2024

Abstract

The conditions for simulating both single-mode behavior and polarization independence in deeply etched amorphous silicon (a-Si) on Silicon-On-Insulator (SOI) rib waveguides are presented and discussed. The paper aims to provide valuable insights and guidance for the design and optimization of waveguide-integrated electro-optic devices based on deeply etched hydrogenated amorphous silicon (a-Si:H)/SOI waveguides operating in a broad spectrum of wavelengths. The top layer of the waveguide consists of a-Si:H, whose deposition can be performed at low temperatures with no impact at all for previously fabricated CMOS-based electro-photonic integrated circuit.

Paper Citation

in Harvard Style

Hashemi B., Rao S., Casalino M. and Della Corte F. (2024). Design and Simulation of Single-Mode and Polarization Independent Deeply Etched Amorphous Silicon on SOI Waveguides. In Proceedings of the 12th International Conference on Photonics, Optics and Laser Technology - Volume 1: PHOTOPTICS; ISBN 978-989-758-686-6, SciTePress, pages 94-98. DOI: 10.5220/0012584200003651

in Bibtex Style

@conference{photoptics24,
author={Babak Hashemi and Sandro Rao and Maurizio Casalino and Francesco Della Corte},
title={Design and Simulation of Single-Mode and Polarization Independent Deeply Etched Amorphous Silicon on SOI Waveguides},
booktitle={Proceedings of the 12th International Conference on Photonics, Optics and Laser Technology - Volume 1: PHOTOPTICS},
year={2024},
pages={94-98},
publisher={SciTePress},
organization={INSTICC},
doi={10.5220/0012584200003651},
isbn={978-989-758-686-6},
}

in EndNote Style

TY - CONF

JO - Proceedings of the 12th International Conference on Photonics, Optics and Laser Technology - Volume 1: PHOTOPTICS
TI - Design and Simulation of Single-Mode and Polarization Independent Deeply Etched Amorphous Silicon on SOI Waveguides
SN - 978-989-758-686-6
AU - Hashemi B.
AU - Rao S.
AU - Casalino M.
AU - Della Corte F.
PY - 2024
SP - 94
EP - 98
DO - 10.5220/0012584200003651
PB - SciTePress