RECONSTRUCTING WAFER SURFACES WITH MODEL BASED SHAPE FROM SHADING

Alexander Nisenboim, Alfred Bruckstein

2007

Abstract

Model based Shape From Shading (SFS) is a promising paradigm introduced by J. Atick for solving such inverse problems when we happen to have some prior information on the depth profiles to be recovered. In the present work we adopt this approach to address the problem of recovering wafer profiles from images taken by a Scanning Electron Microscope (SEM). This problem arises naturally in the microelectronics inspection industry. A low dimensional model based on our prior knowledge of the types of depth profiles of wafer surfaces has been developed and based on it the SFS problem becomes an optimal parameter estimation. Wavelet techniques were then employed to calculate a good initial guess to be used in Levenberg-Marguardt (LM) minimization process that yields the desired profile parametrization. The proposed algorithm has been tested under both Lambertian and SEM imaging models.

Paper Citation

in Harvard Style

Nisenboim A. and Bruckstein A. (2007). RECONSTRUCTING WAFER SURFACES WITH MODEL BASED SHAPE FROM SHADING . In Proceedings of the Second International Conference on Computer Vision Theory and Applications - Volume 2: VISAPP, ISBN 978-972-8865-74-0, pages 333-340. DOI: 10.5220/0002043403330340

in Bibtex Style

@conference{visapp07,
author={Alexander Nisenboim and Alfred Bruckstein},
title={RECONSTRUCTING WAFER SURFACES WITH MODEL BASED SHAPE FROM SHADING},
booktitle={Proceedings of the Second International Conference on Computer Vision Theory and Applications - Volume 2: VISAPP,},
year={2007},
pages={333-340},
publisher={SciTePress},
organization={INSTICC},
doi={10.5220/0002043403330340},
isbn={978-972-8865-74-0},
}

in EndNote Style

TY - CONF
JO - Proceedings of the Second International Conference on Computer Vision Theory and Applications - Volume 2: VISAPP,
TI - RECONSTRUCTING WAFER SURFACES WITH MODEL BASED SHAPE FROM SHADING
SN - 978-972-8865-74-0
AU - Nisenboim A.
AU - Bruckstein A.
PY - 2007
SP - 333
EP - 340
DO - 10.5220/0002043403330340