METHOD FOR MEASURING PARYLENE THICKNESS USING QUARTZ CRYSTAL MICROBALANCE

Henna Heinilä, Maunu Mäntylä, Pekka Heino

2008

Abstract

At present, the exact final thickness of parylene coating is difficult to specify in the beginning of the coating process since the parylene thickness is a function of many components. The elements that control the thickness are substrate surface area in a vacuum chamber, program parameters, and amount of dimer charge. This paper describes a method for measuring parylene coating thickness using quartz crystal microbalance. The thickness is measured by an oscillation frequency change of quartz crystal as parylene deposites on the quartz crystal plate. These results can be used for specifying the parylene thickness real-time during the coating process.

Paper Citation

in Harvard Style

Heinilä H., Mäntylä M. and Heino P. (2008). METHOD FOR MEASURING PARYLENE THICKNESS USING QUARTZ CRYSTAL MICROBALANCE . In Proceedings of the First International Conference on Biomedical Electronics and Devices - Volume 2: BIODEVICES, (BIOSTEC 2008) ISBN 978-989-8111- 17-3, pages 222-226. DOI: 10.5220/0001056102220226

in Bibtex Style

@conference{biodevices08,
author={Henna Heinilä and Maunu Mäntylä and Pekka Heino},
title={METHOD FOR MEASURING PARYLENE THICKNESS USING QUARTZ CRYSTAL MICROBALANCE},
booktitle={Proceedings of the First International Conference on Biomedical Electronics and Devices - Volume 2: BIODEVICES, (BIOSTEC 2008)},
year={2008},
pages={222-226},
publisher={SciTePress},
organization={INSTICC},
doi={10.5220/0001056102220226},
isbn={978-989-8111- 17-3},
}

in EndNote Style

TY - CONF
JO - Proceedings of the First International Conference on Biomedical Electronics and Devices - Volume 2: BIODEVICES, (BIOSTEC 2008)
TI - METHOD FOR MEASURING PARYLENE THICKNESS USING QUARTZ CRYSTAL MICROBALANCE
SN - 978-989-8111- 17-3
AU - Heinilä H.
AU - Mäntylä M.
AU - Heino P.
PY - 2008
SP - 222
EP - 226
DO - 10.5220/0001056102220226