A Nano-opto-mechanical Pressure Mapping Sensor via Bragg Structure Waveguide for Biomedical Sensing

Xin Zhao

2015

Abstract

This paper reports a nano-opto-mechanical mapping sensor based on Bragg structure waveguide. The pressure is measured by monitoring the output spectrum shift which is induced via mechanical deformation of the period of the Bragg structure. In experiments, it measures that the shifting of the output spectra linearly red shift under different position of the Bragg structure when the pressure is increasing. Compared with traditional optical mapping sensor based on Mach-Zehnderinterferometer, the nano-opto-mechanical mapping sensor has merits such as high sensitivity and fine resolution which are 1.55pm/kPa and 1.29kPa, respectively. The nano-opto-mechanical mapping sensor has potential applications such as highly accurate measurement of pressure waves, mass sensors array and bio-medical sensors.

References

  1. D. Donlagic and E. Cibula, 2005.All-fiber high-sensitivity pressure sensor with SiO2 diaphragm. Opt. Lett.
  2. G. T. Kanellos, G. Papaioannou, D.Tsiokos, C. Mitrogiannis, G. Nianios and N. Pleros, 2010.Two dimensional polymer-embedded quasi-distributed FBG pressure sensor for biomedical applications. Opti. Express.
  3. Y. C. Chao, W. J. Lai, C.Y. Chen, H. F. Meng, and H W Zan, 2009."Low voltage active pressure sensor based on polymer space-change-limited transisitor. Appl. Phys. Lett.
  4. M. Esashi, H. Komatsu, and T. Matsuo, 1983.Biomedical pressure sensor using buried piezoresistors. Sens. Actuators A.
  5. C. S. Sander, J. W. Knutt and J. D. Meindl, 1980.A monolithic capacitive pressure sensor with pulseperiod output.IEEE Trans. Electron Devices.
  6. D. D. Bruyker, and R. Puers, 2000.Thermostatic control for temperature compensation of a silicon pressure sensor.Sens. Actuators A.
  7. M. C. Oh, J. W. Kim, K. J. Kim, and S. S. Lee, 2009.Optical pressure sensors based on vertical directional coupling with flexible polymer waveguides. IEEE Photonics Technol. Lett.
  8. M. Shimada, Y. Kinefuchi, and K. Takahashi, 2008.Sleeve-type ultra miniature optical fiber pressure sensor fabricated by DRIE. IEEE Sensors J.
  9. Y. Zhu and A. Wang, 2005.Miniature fiber-optic pressure sensor, IEEE Photon. Technol. Lett.
  10. B.J. Luff, J.S.Wilkinson, J. Piehler, U. Hollenbach, J. Ingenhoff, N. Fabricius, 1998.Integrated optical Mach-Zehnder biosensor. J. Light. Technol.
  11. M. Ohkawa, M. Izutsu, and T. Sueta. 1989.Integrated optic pressure sensor on silicon substrate, Appl. Opt.
  12. N. Pelletier, B. Bêche, N. Tahani, J. Zyss, L. Camberlein, and E.Gaviot, 2007.SU-8 waveguiding interferometric micro-sensor for gage pressure measurement. Sens. Actuators A.
  13. Y. S. Hsu, L. Wang, W.-F. Liu, and Y. J. Chiang, 2006.Temperature compensation of optical fiber Bragg grating pressure sensor. IEEE Photon.Technol. Lett.
  14. T. H. Ning,1997.Trends in CMOS technology and application development,Mater. Chem. Phys. W. P. Eaton, and J. H. Smith.Micromachined pressure sensors: review and recent developments. Smart Mater. Struct.
  15. X. P. Wu, M. F. Hu, J. Y. Shen and Q. H. Ma, 1993.A miniature piezoresistive catheter pressure sensor. Sens. Actuators A.
  16. C. T. Peng, J. C. Lin, C. T. Lin and K. Ning. Chiang, 2005.Performance and package effect of a novel piezoresisitive pressure sensor fabricated by front-side etching technology. Sens. Actuators A.
  17. M. T. C. Silva, and S. K. Manfrin, 1995.Silicon integrated optical pressure sensor based on distributed Bragg reflector structure. SPIE.
  18. H. M. Berger, 1954.A new approach to the analysis of large deflections of plates.
  19. K. Okamoto, 2006.Fundamentals of optical waveguides. Second edition.
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Paper Citation


in Harvard Style

Zhao X. (2015). A Nano-opto-mechanical Pressure Mapping Sensor via Bragg Structure Waveguide for Biomedical Sensing . In Proceedings of the International Conference on Biomedical Electronics and Devices - Volume 1: BIODEVICES, (BIOSTEC 2015) ISBN 978-989-758-071-0, pages 138-143. DOI: 10.5220/0005274101380143


in Bibtex Style

@conference{biodevices15,
author={Xin Zhao},
title={A Nano-opto-mechanical Pressure Mapping Sensor via Bragg Structure Waveguide for Biomedical Sensing},
booktitle={Proceedings of the International Conference on Biomedical Electronics and Devices - Volume 1: BIODEVICES, (BIOSTEC 2015)},
year={2015},
pages={138-143},
publisher={SciTePress},
organization={INSTICC},
doi={10.5220/0005274101380143},
isbn={978-989-758-071-0},
}


in EndNote Style

TY - CONF
JO - Proceedings of the International Conference on Biomedical Electronics and Devices - Volume 1: BIODEVICES, (BIOSTEC 2015)
TI - A Nano-opto-mechanical Pressure Mapping Sensor via Bragg Structure Waveguide for Biomedical Sensing
SN - 978-989-758-071-0
AU - Zhao X.
PY - 2015
SP - 138
EP - 143
DO - 10.5220/0005274101380143