Micromachining of Materials using Femtosecond Laser Pulses - A Parametric Study
K. Garasz, M. Tański, J. Mizeraczyk
2015
Abstract
In the presented research, I have undertaken the problem of femtosecond laser interactions with matter, under various laser pulse parameters and considering a wide group of materials, i.e. metals, plastics, graphene, silicon. There is a considerable interest in the precise material micro and nanomachining with ultrashort laser pulses. It is well established, that the quality of ablation process with femtosecond laser is much better than when using long pulse lasers. The use of femtosecond laser pulses creates an attractive opportunity for high quality micromachining of many groups of materials and opens an interesting field in fundamental research. The objective of the fundamental research proposed within this research is a complex study of the physical phenomena occurring during short-pulsed (femtosecond) laser interactions with matter. Although the research topic itself is very popular in the scientific community, it is relatively little elucidated. A better examination of the effects of electromagnetic irradiation on the materials in the femtosecond regime will provide a better understanding of the subject. The experimental results obtained from this project and theoretical considerations will provide a verification of the existing theories on laser-matter interactions. Additionally, the experimental investigations will be carried out on novel materials, i.e. graphene. I have specifically taken under investigation the laser ablation phenomena, which occurs during a highly energetic laser irradiation of the material and results in detachment of microparticles from the material. The physics of the ablation process in an ultrashort laser pulses regime differs from the ablation caused by the long (nanosecond and picoseconds) laser pulses. The nature of the process is more complex with the short pulses and the complete, research based understanding of the phenomena is not available yet.
References
- Strickland D., Mourou G., 1985, The Dawn of Ultrafast Science and Technology at the University of Rochester, Opt. Commun. 56, 219.
- Mourou G., 1997, The Ultrahigh-Peak-Power Laser: Present and Future, Appl. Phys. B 65.
- Liu X., Du. D., Gourou G., 1997, Thermophysical effects in laser processing of materials with picosecond and femtosecond pulses , IEEE 1. Quantum Electron. 33, 1706.
- Anisimov S. I., Inogamov N. A., Oparin A. M., Rethfeld B., Yabe T., Ogawa M., Fortov V. E., 1999, Pulsed laser evaporation: equation-of-state effects, : Appl. Phys. A, 69, 617.
- Peterlongo A., Miotello A., Kelly R., 1994, Laser-pulse sputtering of aluminum: Vaporization, boiling, superheating, and gas-dynamic effects, Phys. Rev. E 50, 4716.
- Emelyanov V.I., Babak D.V., 2002, Defect capture under rapid solidification of the melt induced by the action of femtosecond laser pulses and formation of periodic surface structures on a semiconductor surface, Appl. Phys. A 74, 797.
- Sokolowski-Tinten, K. Von der Linde D., 2000, Generation of dense electron-hole plasmas in silicon, Phys. Rev. B 61, 2643.
- Chichkov B. N., Momma C., Nolte S., Van Alvensleben F., Tunnerman A., 1996, Femtosecond, picosecond and nanosecond laser ablation of solids, Appl. Phys. A, 63.
- Tom H. W. K., Aumiller G. D., Brito-Cruz C. H., 1988, Time-Resolved Study of Laser-Induced Disorder of Si Surfaces, Phys. Rev. Lett. 60, 1438.
- Sokolowski-Tinten K., Bialkowski L., Doing M., Cavalieri A., Von der Linde D., Oparin. A., Mayer-ter-Vehn J., Anisimov S. I.,1998, Transient States of Matter during Short Pulse Laser Ablation, Phys. Rev. Lett. 81, 224, Zhigilei L. V., Garrison B. J., 2000, Microscopic mechanisms of laser ablation of organic solids in the thermal and stress confinement irradiation regimes, Appl. Phys. 88, 1281.
- Perez D., Lewis L. J., 2002, Ablation of solids under femtosecond laser pulses, Phys. Rev. Lett. 89, 255504.
- Shafer C., Urbassek H. M., Zhigilei L. V., 2002, Metal ablation by picosecond laser pulses: A hybrid simulation, Phys. Rev. B 66, 115404.
- lvanov D. S., Zhigilei L. V., 2003, Effect of Pressure Relaxation on the Mechanisms of Short-Pulse Laser Melting, Phys. Rev. Lett. 91, 105701.
- Perez D., Lewis L. J., 2003, Molecular dynamics study of ablation of solids under femtosecond laser pulses, Phys. Rev. B 67, 184102.
- Dowden J. M., 2009, The Theory of Laser Materials Processing: Heat and Mass Transfer in Modern Technology, Springer.
- Tan B., Dalili A., Venkatakrishnan K.,2009, High repetition rate femtosecond laser nano-machining of thin films, Appl. Phys. A: Materials Science & Processing, 95, 2.
Paper Citation
in Harvard Style
Garasz K., Tański M. and Mizeraczyk J. (2015). Micromachining of Materials using Femtosecond Laser Pulses - A Parametric Study . In Doctoral Consortium - DCPHOTOPTICS, (PHOTOPTICS 2015) ISBN , pages 3-9
in Bibtex Style
@conference{dcphotoptics15,
author={K. Garasz and M. Tański and J. Mizeraczyk},
title={Micromachining of Materials using Femtosecond Laser Pulses - A Parametric Study},
booktitle={Doctoral Consortium - DCPHOTOPTICS, (PHOTOPTICS 2015)},
year={2015},
pages={3-9},
publisher={SciTePress},
organization={INSTICC},
doi={},
isbn={},
}
in EndNote Style
TY - CONF
JO - Doctoral Consortium - DCPHOTOPTICS, (PHOTOPTICS 2015)
TI - Micromachining of Materials using Femtosecond Laser Pulses - A Parametric Study
SN -
AU - Garasz K.
AU - Tański M.
AU - Mizeraczyk J.
PY - 2015
SP - 3
EP - 9
DO -