Two-dimensional Laser Scanner with Low Mechanical Cross Coupling based on Piezoelectric Actuators

Chen Wei, Luo Dong, Liang Yuanbo, Liu Peng, Chen Liangpei, Zhang Yizhou

2019

Abstract

Traditional two-dimensional laser scanners usually employ two-degree-of-freedom flexible hinges. However, these flexible hinges suffer from mechanical cross coupling between axes, which will reduce the scanning accuracy and stability. To overcome the above disadvantages, a compact novel laser scanner based on piezoelectric actuators is presented. The scanner uses only three one-dimensional flexible hinges to achieve two-axis feature. The mechanical structure and principle are detailed. Then the capabilities of the scanner are tested by a performance test system. The test results show that the scanner has a tilt angle of 43.19 mrad for X-axis with resonance frequency at 149.21 Hz and 2.41 mrad for Y-axis with resonance frequency at 232.59 Hz. Its scanning nonlinearity is reduced from 3% to 0.5% for X-axis and from 6% to 1% after compensation. The test results and the actual scanning images prove the low mechanical cross coupling.

Paper Citation

in Harvard Style

Wei C., Dong L., Yuanbo L., Peng L., Liangpei C. and Yizhou Z. (2019). Two-dimensional Laser Scanner with Low Mechanical Cross Coupling based on Piezoelectric Actuators.In Proceedings of the 7th International Conference on Photonics, Optics and Laser Technology - Volume 1: PHOTOPTICS, ISBN 978-989-758-364-3, pages 129-133. DOI: 10.5220/0007360301290133

in Bibtex Style

@conference{photoptics19,
author={Chen Wei and Luo Dong and Liang Yuanbo and Liu Peng and Chen Liangpei and Zhang Yizhou},
title={Two-dimensional Laser Scanner with Low Mechanical Cross Coupling based on Piezoelectric Actuators},
booktitle={Proceedings of the 7th International Conference on Photonics, Optics and Laser Technology - Volume 1: PHOTOPTICS,},
year={2019},
pages={129-133},
publisher={SciTePress},
organization={INSTICC},
doi={10.5220/0007360301290133},
isbn={978-989-758-364-3},
}

in EndNote Style

TY - CONF

JO - Proceedings of the 7th International Conference on Photonics, Optics and Laser Technology - Volume 1: PHOTOPTICS,
TI - Two-dimensional Laser Scanner with Low Mechanical Cross Coupling based on Piezoelectric Actuators
SN - 978-989-758-364-3
AU - Wei C.
AU - Dong L.
AU - Yuanbo L.
AU - Peng L.
AU - Liangpei C.
AU - Yizhou Z.
PY - 2019
SP - 129
EP - 133
DO - 10.5220/0007360301290133