Applications of Sparse Modelling and Principle Component Analysis for the Virtual Metrology of Comprehensive Multi-dimensional Quality

Sumika Arima, Takuya Nagata, Huizhen Bu, Satsuki Shimada

2019

Abstract

This paper discussed the virtual metrology (VM) modelling of multi-class quality to describe the relationship between the variables of a production machine's condition and the estimated/forecasted product quality soon after finishing the machine processing. Applications of PCA and LASSO technique of the Sparse modelling were introduced to define the multi-dimensional quality. Because the high accuracy and quick computations are required for the VM modelling, in this study, the PCA-LASSO combination was applied before building the VM models based on the kernel SVM (kSVM), particularly the linear kernel for real-time use. As the result of evaluation of a CVD (Chemical vapor deposition) process in an actual semiconductor factory, LASSO and linear-SVM could reduce the scale of the machine variable's set and calculation time by almost 57% and 95% without deterioration of accuracy even without PCA. In addition, as the PCA-LASSO, the multi-dimensional quality was rotated to the orthogonality space by PCA to summarize the extracted variables responding to the primary independent hyperspace. As the result of the PCA-LASSO combination, the scale of machine variables extracted was improved by 83%, besides the accuracy of the linear-SVM is 98%. It is also effective as the pre-process of Partial Least Square (PLS).

Paper Citation

in Harvard Style

Arima S., Nagata T., Bu H. and Shimada S. (2019). Applications of Sparse Modelling and Principle Component Analysis for the Virtual Metrology of Comprehensive Multi-dimensional Quality.In Proceedings of the 8th International Conference on Operations Research and Enterprise Systems - Volume 1: ICORES, ISBN 978-989-758-352-0, pages 354-361. DOI: 10.5220/0007385603540361

in Bibtex Style

@conference{icores19,
author={Sumika Arima and Takuya Nagata and Huizhen Bu and Satsuki Shimada},
title={Applications of Sparse Modelling and Principle Component Analysis for the Virtual Metrology of Comprehensive Multi-dimensional Quality},
booktitle={Proceedings of the 8th International Conference on Operations Research and Enterprise Systems - Volume 1: ICORES,},
year={2019},
pages={354-361},
publisher={SciTePress},
organization={INSTICC},
doi={10.5220/0007385603540361},
isbn={978-989-758-352-0},
}

in EndNote Style

TY - CONF

JO - Proceedings of the 8th International Conference on Operations Research and Enterprise Systems - Volume 1: ICORES,
TI - Applications of Sparse Modelling and Principle Component Analysis for the Virtual Metrology of Comprehensive Multi-dimensional Quality
SN - 978-989-758-352-0
AU - Arima S.
AU - Nagata T.
AU - Bu H.
AU - Shimada S.
PY - 2019
SP - 354
EP - 361
DO - 10.5220/0007385603540361