High Uniformity Design of UV LED Illuminators for Exposure Equipment

Chun-Han Chou, Yu-Hsuan Lin, Hsin-Yi Tsai, Ray-Ching Hong, Yi-Yung Chen

2021

Abstract

We have presented the optical system design of control uniformity illumination system for stepper lithography. The illumination system acted a key factor in the lithography, because the output light source quality affected the exposure resolution and yield rate of products. The illumination system was composed by seven lens, imaging field was 12.6mm, chief ray angle was less than 0.4 degrees, distortion was less than 0.47% and numerical aperture was 0.1644. the irradiance flux of target area average was about 20 mW/cm2. The system’s uniformity deviation was less than ± 3 percentages. Each UV-LED of illumination system was individually controlled. It could make the imaging plane always have high uniformity to overcome the problem of light source attenuation.

Paper Citation

in Harvard Style

Chou C., Lin Y., Tsai H., Hong R. and Chen Y. (2021). High Uniformity Design of UV LED Illuminators for Exposure Equipment.In Proceedings of the 9th International Conference on Photonics, Optics and Laser Technology - Volume 1: PHOTOPTICS, ISBN 978-989-758-492-3, pages 68-72. DOI: 10.5220/0010222300680072

in Bibtex Style

@conference{photoptics21,
author={Chun-Han Chou and Yu-Hsuan Lin and Hsin-Yi Tsai and Ray-Ching Hong and Yi-Yung Chen},
title={High Uniformity Design of UV LED Illuminators for Exposure Equipment},
booktitle={Proceedings of the 9th International Conference on Photonics, Optics and Laser Technology - Volume 1: PHOTOPTICS,},
year={2021},
pages={68-72},
publisher={SciTePress},
organization={INSTICC},
doi={10.5220/0010222300680072},
isbn={978-989-758-492-3},
}

in EndNote Style

TY - CONF

JO - Proceedings of the 9th International Conference on Photonics, Optics and Laser Technology - Volume 1: PHOTOPTICS,
TI - High Uniformity Design of UV LED Illuminators for Exposure Equipment
SN - 978-989-758-492-3
AU - Chou C.
AU - Lin Y.
AU - Tsai H.
AU - Hong R.
AU - Chen Y.
PY - 2021
SP - 68
EP - 72
DO - 10.5220/0010222300680072